Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023157183> ?p ?o ?g. }
Showing items 1 to 81 of
81
with 100 items per page.
- W2023157183 endingPage "87" @default.
- W2023157183 startingPage "84" @default.
- W2023157183 abstract "A computer simulation of laser annealing ion-implanted silicon with 1.06-μm radiation at energy densities of 38–76 MW/cm2 shows that the amorphous surface layer of the silicon melts. Quantitative predictions for the depth of the molten zone and the impurity distribution as a function of peak laser intensity and pulse duration agree well with published experimental observations. Additional analysis indicated that pulse duration, peak power density, and the impurity implantation depth are of primary importance in controlling the laser annealing process. Also, step junctions may be produced for optimal values of these parameters." @default.
- W2023157183 created "2016-06-24" @default.
- W2023157183 creator A5045428442 @default.
- W2023157183 creator A5076111835 @default.
- W2023157183 date "1979-01-01" @default.
- W2023157183 modified "2023-09-26" @default.
- W2023157183 title "A computer simulation of laser annealing silicon at 1.06 μm" @default.
- W2023157183 cites W1971113486 @default.
- W2023157183 cites W1998570209 @default.
- W2023157183 cites W2037210874 @default.
- W2023157183 cites W2064783468 @default.
- W2023157183 cites W2072298802 @default.
- W2023157183 cites W2072346196 @default.
- W2023157183 cites W4376848344 @default.
- W2023157183 doi "https://doi.org/10.1063/1.90569" @default.
- W2023157183 hasPublicationYear "1979" @default.
- W2023157183 type Work @default.
- W2023157183 sameAs 2023157183 @default.
- W2023157183 citedByCount "49" @default.
- W2023157183 crossrefType "journal-article" @default.
- W2023157183 hasAuthorship W2023157183A5045428442 @default.
- W2023157183 hasAuthorship W2023157183A5076111835 @default.
- W2023157183 hasConcept C120665830 @default.
- W2023157183 hasConcept C121332964 @default.
- W2023157183 hasConcept C145148216 @default.
- W2023157183 hasConcept C169150495 @default.
- W2023157183 hasConcept C178790620 @default.
- W2023157183 hasConcept C184779094 @default.
- W2023157183 hasConcept C185592680 @default.
- W2023157183 hasConcept C191897082 @default.
- W2023157183 hasConcept C192562407 @default.
- W2023157183 hasConcept C2776390347 @default.
- W2023157183 hasConcept C2777855556 @default.
- W2023157183 hasConcept C2779667780 @default.
- W2023157183 hasConcept C41823505 @default.
- W2023157183 hasConcept C49040817 @default.
- W2023157183 hasConcept C520434653 @default.
- W2023157183 hasConcept C544956773 @default.
- W2023157183 hasConcept C56052488 @default.
- W2023157183 hasConcept C71987851 @default.
- W2023157183 hasConcept C8010536 @default.
- W2023157183 hasConceptScore W2023157183C120665830 @default.
- W2023157183 hasConceptScore W2023157183C121332964 @default.
- W2023157183 hasConceptScore W2023157183C145148216 @default.
- W2023157183 hasConceptScore W2023157183C169150495 @default.
- W2023157183 hasConceptScore W2023157183C178790620 @default.
- W2023157183 hasConceptScore W2023157183C184779094 @default.
- W2023157183 hasConceptScore W2023157183C185592680 @default.
- W2023157183 hasConceptScore W2023157183C191897082 @default.
- W2023157183 hasConceptScore W2023157183C192562407 @default.
- W2023157183 hasConceptScore W2023157183C2776390347 @default.
- W2023157183 hasConceptScore W2023157183C2777855556 @default.
- W2023157183 hasConceptScore W2023157183C2779667780 @default.
- W2023157183 hasConceptScore W2023157183C41823505 @default.
- W2023157183 hasConceptScore W2023157183C49040817 @default.
- W2023157183 hasConceptScore W2023157183C520434653 @default.
- W2023157183 hasConceptScore W2023157183C544956773 @default.
- W2023157183 hasConceptScore W2023157183C56052488 @default.
- W2023157183 hasConceptScore W2023157183C71987851 @default.
- W2023157183 hasConceptScore W2023157183C8010536 @default.
- W2023157183 hasIssue "1" @default.
- W2023157183 hasLocation W20231571831 @default.
- W2023157183 hasOpenAccess W2023157183 @default.
- W2023157183 hasPrimaryLocation W20231571831 @default.
- W2023157183 hasRelatedWork W1997038225 @default.
- W2023157183 hasRelatedWork W2004879883 @default.
- W2023157183 hasRelatedWork W2009819460 @default.
- W2023157183 hasRelatedWork W2023157183 @default.
- W2023157183 hasRelatedWork W2041833038 @default.
- W2023157183 hasRelatedWork W2043118447 @default.
- W2023157183 hasRelatedWork W2049455007 @default.
- W2023157183 hasRelatedWork W2049598657 @default.
- W2023157183 hasRelatedWork W2061728122 @default.
- W2023157183 hasRelatedWork W2094221410 @default.
- W2023157183 hasVolume "34" @default.
- W2023157183 isParatext "false" @default.
- W2023157183 isRetracted "false" @default.
- W2023157183 magId "2023157183" @default.
- W2023157183 workType "article" @default.