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- W2023163362 abstract "One of the most widespread uses of polysilicon in MOS devices is as the gate electrode for transistors. The gates described here are processed via a two stage poly deposition. The first stage is a thin gate poly deposition used as an implant screen for threshold adjust implants followed by a thick gate poly deposition. Soon after on- product measurement was introduce at a thin gate polysilicon deposition, QBD failures became the most frequent failure mode. A cross-functional team discovered the wafers failing for QBD were used as on-product measurement wafers at polysilicon deposition. Process mapping revealed the wafer failures for QBD were always loaded directly next to poly dummy wafers during deposition. TEM of nucleation sites disclosed there is a competing reaction between the poly dummy wafer directly above the product wafer and the product wafer. The silane prefers to react on the dummy wafer, leading to less area coverage on the product wafers, which leads to rougher, larger grains. The preclean process for the thick gate poly deposition uses a HF dip. It was proposed that HF was penetrating more easily into the rougher poly grains during the HF dip, damaging the gate oxide, and subsequently causing shorts." @default.
- W2023163362 created "2016-06-24" @default.
- W2023163362 creator A5009636325 @default.
- W2023163362 creator A5010416121 @default.
- W2023163362 creator A5017409465 @default.
- W2023163362 creator A5044186629 @default.
- W2023163362 creator A5060551290 @default.
- W2023163362 date "1998-09-03" @default.
- W2023163362 modified "2023-09-27" @default.
- W2023163362 title "<title>Mechanism for QBD failure in poly gates</title>" @default.
- W2023163362 doi "https://doi.org/10.1117/12.324333" @default.
- W2023163362 hasPublicationYear "1998" @default.
- W2023163362 type Work @default.
- W2023163362 sameAs 2023163362 @default.
- W2023163362 citedByCount "0" @default.
- W2023163362 crossrefType "proceedings-article" @default.
- W2023163362 hasAuthorship W2023163362A5009636325 @default.
- W2023163362 hasAuthorship W2023163362A5010416121 @default.
- W2023163362 hasAuthorship W2023163362A5017409465 @default.
- W2023163362 hasAuthorship W2023163362A5044186629 @default.
- W2023163362 hasAuthorship W2023163362A5060551290 @default.
- W2023163362 hasConcept C119599485 @default.
- W2023163362 hasConcept C127413603 @default.
- W2023163362 hasConcept C151730666 @default.
- W2023163362 hasConcept C160671074 @default.
- W2023163362 hasConcept C165801399 @default.
- W2023163362 hasConcept C171250308 @default.
- W2023163362 hasConcept C172385210 @default.
- W2023163362 hasConcept C192562407 @default.
- W2023163362 hasConcept C2361726 @default.
- W2023163362 hasConcept C24326235 @default.
- W2023163362 hasConcept C2816523 @default.
- W2023163362 hasConcept C49040817 @default.
- W2023163362 hasConcept C64297162 @default.
- W2023163362 hasConcept C86803240 @default.
- W2023163362 hasConceptScore W2023163362C119599485 @default.
- W2023163362 hasConceptScore W2023163362C127413603 @default.
- W2023163362 hasConceptScore W2023163362C151730666 @default.
- W2023163362 hasConceptScore W2023163362C160671074 @default.
- W2023163362 hasConceptScore W2023163362C165801399 @default.
- W2023163362 hasConceptScore W2023163362C171250308 @default.
- W2023163362 hasConceptScore W2023163362C172385210 @default.
- W2023163362 hasConceptScore W2023163362C192562407 @default.
- W2023163362 hasConceptScore W2023163362C2361726 @default.
- W2023163362 hasConceptScore W2023163362C24326235 @default.
- W2023163362 hasConceptScore W2023163362C2816523 @default.
- W2023163362 hasConceptScore W2023163362C49040817 @default.
- W2023163362 hasConceptScore W2023163362C64297162 @default.
- W2023163362 hasConceptScore W2023163362C86803240 @default.
- W2023163362 hasLocation W20231633621 @default.
- W2023163362 hasOpenAccess W2023163362 @default.
- W2023163362 hasPrimaryLocation W20231633621 @default.
- W2023163362 hasRelatedWork W1540127313 @default.
- W2023163362 hasRelatedWork W2023578107 @default.
- W2023163362 hasRelatedWork W2034833668 @default.
- W2023163362 hasRelatedWork W2043437204 @default.
- W2023163362 hasRelatedWork W2058676402 @default.
- W2023163362 hasRelatedWork W2160913304 @default.
- W2023163362 hasRelatedWork W2299312516 @default.
- W2023163362 hasRelatedWork W2329285141 @default.
- W2023163362 hasRelatedWork W2902546961 @default.
- W2023163362 hasRelatedWork W4313653414 @default.
- W2023163362 isParatext "false" @default.
- W2023163362 isRetracted "false" @default.
- W2023163362 magId "2023163362" @default.
- W2023163362 workType "article" @default.