FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023176906> ?p ?o ?g. }

• W2023176906 endingPage "896" @default.
• W2023176906 startingPage "893" @default.
• W2023176906 abstract "Ion beam deposition using low-energy (100 eV) Si2+ focused ion beams (FIB) was performed on gold evaporated substrate at room temperature under various deposition conditions, such as beam scan rates of the FIB and background oxygen pressures of the sample chamber during the deposition. From Auger electron spectroscopy (AES) measurement, it was found that the amount of the oxygen incorporated inside the film can be controlled by the deposition ambient. From the chemical shift in AES spectra and Raman spectroscopy, it was found that deposited Si without oxygen ambient was amorphous and the observed oxygen in the film deposited in high oxygen ambient was chemically bonded with silicon and formed silicon-oxygen bonds." @default.
• W2023176906 created "2016-06-24" @default.
• W2023176906 creator A5002721527 @default.
• W2023176906 creator A5040900292 @default.
• W2023176906 creator A5061730561 @default.
• W2023176906 creator A5081276816 @default.
• W2023176906 creator A5088217399 @default.
• W2023176906 date "1997-05-01" @default.
• W2023176906 modified "2023-09-29" @default.
• W2023176906 title "Direct deposition of silicon and silicon-oxide films using low-energy Si focused ion beams" @default.
• W2023176906 cites W1964987947 @default.
• W2023176906 cites W1967009281 @default.
• W2023176906 cites W1972238877 @default.
• W2023176906 cites W1974564874 @default.
• W2023176906 cites W1976820902 @default.
• W2023176906 cites W1977087368 @default.
• W2023176906 cites W1981192688 @default.
• W2023176906 cites W1996710743 @default.
• W2023176906 cites W2004244616 @default.
• W2023176906 cites W2004287510 @default.
• W2023176906 cites W2012127388 @default.
• W2023176906 cites W2014412235 @default.
• W2023176906 cites W2018980295 @default.
• W2023176906 cites W2023086877 @default.
• W2023176906 cites W2029247971 @default.
• W2023176906 cites W2044906443 @default.
• W2023176906 cites W2063038368 @default.
• W2023176906 cites W2067675729 @default.
• W2023176906 cites W2070717492 @default.
• W2023176906 cites W2078403497 @default.
• W2023176906 doi "https://doi.org/10.1016/s0168-583x(97)00027-x" @default.
• W2023176906 hasPublicationYear "1997" @default.
• W2023176906 type Work @default.
• W2023176906 sameAs 2023176906 @default.
• W2023176906 citedByCount "5" @default.
• W2023176906 countsByYear W20231769062013 @default.
• W2023176906 crossrefType "journal-article" @default.
• W2023176906 hasAuthorship W2023176906A5002721527 @default.
• W2023176906 hasAuthorship W2023176906A5040900292 @default.
• W2023176906 hasAuthorship W2023176906A5061730561 @default.
• W2023176906 hasAuthorship W2023176906A5081276816 @default.
• W2023176906 hasAuthorship W2023176906A5088217399 @default.
• W2023176906 hasConcept C109486029 @default.
• W2023176906 hasConcept C111368507 @default.
• W2023176906 hasConcept C113196181 @default.
• W2023176906 hasConcept C120665830 @default.
• W2023176906 hasConcept C121332964 @default.
• W2023176906 hasConcept C127313418 @default.
• W2023176906 hasConcept C145148216 @default.
• W2023176906 hasConcept C146088050 @default.
• W2023176906 hasConcept C151730666 @default.
• W2023176906 hasConcept C171250308 @default.
• W2023176906 hasConcept C178790620 @default.
• W2023176906 hasConcept C185544564 @default.
• W2023176906 hasConcept C185592680 @default.
• W2023176906 hasConcept C192562407 @default.
• W2023176906 hasConcept C193016168 @default.
• W2023176906 hasConcept C25442681 @default.
• W2023176906 hasConcept C2776390347 @default.
• W2023176906 hasConcept C2777289219 @default.
• W2023176906 hasConcept C2777431650 @default.
• W2023176906 hasConcept C2779105228 @default.
• W2023176906 hasConcept C2779667780 @default.
• W2023176906 hasConcept C2781463530 @default.
• W2023176906 hasConcept C2816523 @default.
• W2023176906 hasConcept C40003534 @default.
• W2023176906 hasConcept C43617362 @default.
• W2023176906 hasConcept C49040817 @default.
• W2023176906 hasConcept C50774322 @default.
• W2023176906 hasConcept C540031477 @default.
• W2023176906 hasConcept C544956773 @default.
• W2023176906 hasConcept C56052488 @default.
• W2023176906 hasConcept C64297162 @default.
• W2023176906 hasConcept C8010536 @default.
• W2023176906 hasConcept C86803240 @default.
• W2023176906 hasConcept C93106096 @default.
• W2023176906 hasConceptScore W2023176906C109486029 @default.
• W2023176906 hasConceptScore W2023176906C111368507 @default.
• W2023176906 hasConceptScore W2023176906C113196181 @default.
• W2023176906 hasConceptScore W2023176906C120665830 @default.
• W2023176906 hasConceptScore W2023176906C121332964 @default.
• W2023176906 hasConceptScore W2023176906C127313418 @default.
• W2023176906 hasConceptScore W2023176906C145148216 @default.
• W2023176906 hasConceptScore W2023176906C146088050 @default.
• W2023176906 hasConceptScore W2023176906C151730666 @default.
• W2023176906 hasConceptScore W2023176906C171250308 @default.
• W2023176906 hasConceptScore W2023176906C178790620 @default.
• W2023176906 hasConceptScore W2023176906C185544564 @default.
• W2023176906 hasConceptScore W2023176906C185592680 @default.
• W2023176906 hasConceptScore W2023176906C192562407 @default.
• W2023176906 hasConceptScore W2023176906C193016168 @default.
• W2023176906 hasConceptScore W2023176906C25442681 @default.
• W2023176906 hasConceptScore W2023176906C2776390347 @default.
• W2023176906 hasConceptScore W2023176906C2777289219 @default.
• W2023176906 hasConceptScore W2023176906C2777431650 @default.
• W2023176906 hasConceptScore W2023176906C2779105228 @default.
• W2023176906 hasConceptScore W2023176906C2779667780 @default.
• W2023176906 hasConceptScore W2023176906C2781463530 @default.

• next