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• W2023189557 abstract "FEM simulation is often a very time-consuming process in the design optimization of complex MEMS. System-level models with reduced order and accuracy have to be generated as a basis of a multi-domain system simulation. A powerful modelling methodology is needed to develop a library of MEMS models for different physical domains (mechanical, magnetic, fluidic, ...). The components are modelled as multi-terminal elements (multipoles) in generalized KIRCHHOFFian networks and are described with VHDL-AMS or other model description languages. Numerical model generation and parameterization is supported by a tool suite. Simulator coupling offers an additional possibility for analyzing heterogeneous MEMS." @default.
• W2023189557 created "2016-06-24" @default.
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• W2023189557 date "2001-04-30" @default.
• W2023189557 modified "2023-10-18" @default.
• W2023189557 title "<title>Model library and tool support for MEMS simulation</title>" @default.
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• W2023189557 doi "https://doi.org/10.1117/12.425295" @default.
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