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- W2023193921 abstract "Optically smooth diamond films were deposited on Al and Si substrates by the ECR-PACVD method. The films on Al were grown on relatively low temperatures and pressures from CH<SUB>3</SUB>OH/H<SUB>2</SUB>O and were found to have highly defective nanocrystalline structure. The films on c-Si were grown at higher temperatures and pressures from CH<SUB>4</SUB>/H<SUB>2</SUB>/O<SUB>2</SUB> and were found to consist of highly oriented (100) faceted crystals. The optical constants of the diamond films on c-Si are similar to those of natural diamond." @default.
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- W2023193921 date "1992-11-20" @default.
- W2023193921 modified "2023-09-23" @default.
- W2023193921 title "<title>Properties of optically smooth diamond thin films produced by ECR-PACVD</title>" @default.
- W2023193921 doi "https://doi.org/10.1117/12.130766" @default.
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