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- W2023241131 abstract "Performances of the nanoimprint lithography templates were discussed considering the readiness toward the high volume manufacturing of nanoimprint lithography application along with the requirement for the templates and its fabrication process. The current status of the three major performances of the templates was shown." @default.
- W2023241131 created "2016-06-24" @default.
- W2023241131 creator A5015801593 @default.
- W2023241131 creator A5026604772 @default.
- W2023241131 creator A5077380899 @default.
- W2023241131 creator A5077972762 @default.
- W2023241131 creator A5080159637 @default.
- W2023241131 creator A5088363151 @default.
- W2023241131 date "2015-03-19" @default.
- W2023241131 modified "2023-09-23" @default.
- W2023241131 title "HVM readiness of nanoimprint lithography templates: defects, CD, and overlay" @default.
- W2023241131 cites W1974689611 @default.
- W2023241131 cites W2172673429 @default.
- W2023241131 cites W2467647098 @default.
- W2023241131 doi "https://doi.org/10.1117/12.2175483" @default.
- W2023241131 hasPublicationYear "2015" @default.
- W2023241131 type Work @default.
- W2023241131 sameAs 2023241131 @default.
- W2023241131 citedByCount "3" @default.
- W2023241131 countsByYear W20232411312016 @default.
- W2023241131 crossrefType "proceedings-article" @default.
- W2023241131 hasAuthorship W2023241131A5015801593 @default.
- W2023241131 hasAuthorship W2023241131A5026604772 @default.
- W2023241131 hasAuthorship W2023241131A5077380899 @default.
- W2023241131 hasAuthorship W2023241131A5077972762 @default.
- W2023241131 hasAuthorship W2023241131A5080159637 @default.
- W2023241131 hasAuthorship W2023241131A5088363151 @default.
- W2023241131 hasConcept C121332964 @default.
- W2023241131 hasConcept C136085584 @default.
- W2023241131 hasConcept C136525101 @default.
- W2023241131 hasConcept C142724271 @default.
- W2023241131 hasConcept C160671074 @default.
- W2023241131 hasConcept C162117346 @default.
- W2023241131 hasConcept C163581340 @default.
- W2023241131 hasConcept C171250308 @default.
- W2023241131 hasConcept C177409738 @default.
- W2023241131 hasConcept C192562407 @default.
- W2023241131 hasConcept C199360897 @default.
- W2023241131 hasConcept C200274948 @default.
- W2023241131 hasConcept C204223013 @default.
- W2023241131 hasConcept C204787440 @default.
- W2023241131 hasConcept C20556612 @default.
- W2023241131 hasConcept C2777046567 @default.
- W2023241131 hasConcept C2779227376 @default.
- W2023241131 hasConcept C41008148 @default.
- W2023241131 hasConcept C49040817 @default.
- W2023241131 hasConcept C53524968 @default.
- W2023241131 hasConcept C62520636 @default.
- W2023241131 hasConcept C66018809 @default.
- W2023241131 hasConcept C71924100 @default.
- W2023241131 hasConcept C82714645 @default.
- W2023241131 hasConceptScore W2023241131C121332964 @default.
- W2023241131 hasConceptScore W2023241131C136085584 @default.
- W2023241131 hasConceptScore W2023241131C136525101 @default.
- W2023241131 hasConceptScore W2023241131C142724271 @default.
- W2023241131 hasConceptScore W2023241131C160671074 @default.
- W2023241131 hasConceptScore W2023241131C162117346 @default.
- W2023241131 hasConceptScore W2023241131C163581340 @default.
- W2023241131 hasConceptScore W2023241131C171250308 @default.
- W2023241131 hasConceptScore W2023241131C177409738 @default.
- W2023241131 hasConceptScore W2023241131C192562407 @default.
- W2023241131 hasConceptScore W2023241131C199360897 @default.
- W2023241131 hasConceptScore W2023241131C200274948 @default.
- W2023241131 hasConceptScore W2023241131C204223013 @default.
- W2023241131 hasConceptScore W2023241131C204787440 @default.
- W2023241131 hasConceptScore W2023241131C20556612 @default.
- W2023241131 hasConceptScore W2023241131C2777046567 @default.
- W2023241131 hasConceptScore W2023241131C2779227376 @default.
- W2023241131 hasConceptScore W2023241131C41008148 @default.
- W2023241131 hasConceptScore W2023241131C49040817 @default.
- W2023241131 hasConceptScore W2023241131C53524968 @default.
- W2023241131 hasConceptScore W2023241131C62520636 @default.
- W2023241131 hasConceptScore W2023241131C66018809 @default.
- W2023241131 hasConceptScore W2023241131C71924100 @default.
- W2023241131 hasConceptScore W2023241131C82714645 @default.
- W2023241131 hasLocation W20232411311 @default.
- W2023241131 hasOpenAccess W2023241131 @default.
- W2023241131 hasPrimaryLocation W20232411311 @default.
- W2023241131 hasRelatedWork W114158331 @default.
- W2023241131 hasRelatedWork W2003241729 @default.
- W2023241131 hasRelatedWork W2023241131 @default.
- W2023241131 hasRelatedWork W2051099321 @default.
- W2023241131 hasRelatedWork W2975301058 @default.
- W2023241131 hasRelatedWork W3131219946 @default.
- W2023241131 hasRelatedWork W3203235942 @default.
- W2023241131 hasRelatedWork W4233494348 @default.
- W2023241131 hasRelatedWork W1968900008 @default.
- W2023241131 hasRelatedWork W2531036728 @default.
- W2023241131 isParatext "false" @default.
- W2023241131 isRetracted "false" @default.
- W2023241131 magId "2023241131" @default.
- W2023241131 workType "article" @default.