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• W2023241955 abstract "We report the preparation of Ir-based electrode thin films by liquid-delivery MOCVD using a vaporizer system. A novel liquid precursor, Ir(EtCp)(C2H4)2, and etylcyclohexane (ECH) were used as a precursor and solvent, respectively. (111)-oriented Ir thin films with a root-mean-square surface roughness of 2.2 nm and an electrical resistivity of 14 muOmega-cm were successfully obtained on SiO2/Si at 400degC. However, it was difficult to form IrO2 films because oxygen was consumed for the decomposition of the solvent, ECH. The step coverage of-40% was obtained for Ir films on SiO2-stepped substrate with an aspect ratio of 0.7." @default.
• W2023241955 created "2016-06-24" @default.
• W2023241955 creator A5003785538 @default.
• W2023241955 creator A5023886178 @default.
• W2023241955 creator A5031685667 @default.
• W2023241955 creator A5039418602 @default.
• W2023241955 creator A5042614333 @default.
• W2023241955 creator A5043482691 @default.
• W2023241955 creator A5052206175 @default.
• W2023241955 creator A5061358821 @default.
• W2023241955 date "2007-05-01" @default.
• W2023241955 modified "2023-09-27" @default.
• W2023241955 title "Preparation of Ir-Based Electrode Thin Films by Liquid-Delivery MOCVD" @default.
• W2023241955 cites W1984178755 @default.
• W2023241955 cites W1989186757 @default.
• W2023241955 cites W1994634952 @default.
• W2023241955 cites W2016696502 @default.
• W2023241955 cites W2045694919 @default.
• W2023241955 cites W2049293459 @default.
• W2023241955 cites W2060568842 @default.
• W2023241955 cites W2068554822 @default.
• W2023241955 cites W2083359221 @default.
• W2023241955 cites W2083958163 @default.
• W2023241955 cites W2114212458 @default.
• W2023241955 cites W2117052470 @default.
• W2023241955 cites W2141264663 @default.
• W2023241955 cites W2160864149 @default.
• W2023241955 cites W2332404389 @default.
• W2023241955 cites W2335534931 @default.
• W2023241955 cites W2522441487 @default.
• W2023241955 doi "https://doi.org/10.1109/isaf.2007.4393209" @default.
• W2023241955 hasPublicationYear "2007" @default.
• W2023241955 type Work @default.
• W2023241955 sameAs 2023241955 @default.
• W2023241955 citedByCount "0" @default.
• W2023241955 crossrefType "proceedings-article" @default.
• W2023241955 hasAuthorship W2023241955A5003785538 @default.
• W2023241955 hasAuthorship W2023241955A5023886178 @default.
• W2023241955 hasAuthorship W2023241955A5031685667 @default.
• W2023241955 hasAuthorship W2023241955A5039418602 @default.
• W2023241955 hasAuthorship W2023241955A5042614333 @default.
• W2023241955 hasAuthorship W2023241955A5043482691 @default.
• W2023241955 hasAuthorship W2023241955A5052206175 @default.
• W2023241955 hasAuthorship W2023241955A5061358821 @default.
• W2023241955 hasConcept C107365816 @default.
• W2023241955 hasConcept C110738630 @default.
• W2023241955 hasConcept C111368507 @default.
• W2023241955 hasConcept C113196181 @default.
• W2023241955 hasConcept C119599485 @default.
• W2023241955 hasConcept C127313418 @default.
• W2023241955 hasConcept C127413603 @default.
• W2023241955 hasConcept C147789679 @default.
• W2023241955 hasConcept C159985019 @default.
• W2023241955 hasConcept C171250308 @default.
• W2023241955 hasConcept C17525397 @default.
• W2023241955 hasConcept C175665537 @default.
• W2023241955 hasConcept C178790620 @default.
• W2023241955 hasConcept C185592680 @default.
• W2023241955 hasConcept C19067145 @default.
• W2023241955 hasConcept C192562407 @default.
• W2023241955 hasConcept C2777289219 @default.
• W2023241955 hasConcept C2779227376 @default.
• W2023241955 hasConcept C2780471494 @default.
• W2023241955 hasConcept C42360764 @default.
• W2023241955 hasConcept C49040817 @default.
• W2023241955 hasConcept C69990965 @default.
• W2023241955 hasConcept C71039073 @default.
• W2023241955 hasConcept C71907059 @default.
• W2023241955 hasConceptScore W2023241955C107365816 @default.
• W2023241955 hasConceptScore W2023241955C110738630 @default.
• W2023241955 hasConceptScore W2023241955C111368507 @default.
• W2023241955 hasConceptScore W2023241955C113196181 @default.
• W2023241955 hasConceptScore W2023241955C119599485 @default.
• W2023241955 hasConceptScore W2023241955C127313418 @default.
• W2023241955 hasConceptScore W2023241955C127413603 @default.
• W2023241955 hasConceptScore W2023241955C147789679 @default.
• W2023241955 hasConceptScore W2023241955C159985019 @default.
• W2023241955 hasConceptScore W2023241955C171250308 @default.
• W2023241955 hasConceptScore W2023241955C17525397 @default.
• W2023241955 hasConceptScore W2023241955C175665537 @default.
• W2023241955 hasConceptScore W2023241955C178790620 @default.
• W2023241955 hasConceptScore W2023241955C185592680 @default.
• W2023241955 hasConceptScore W2023241955C19067145 @default.
• W2023241955 hasConceptScore W2023241955C192562407 @default.
• W2023241955 hasConceptScore W2023241955C2777289219 @default.
• W2023241955 hasConceptScore W2023241955C2779227376 @default.
• W2023241955 hasConceptScore W2023241955C2780471494 @default.
• W2023241955 hasConceptScore W2023241955C42360764 @default.
• W2023241955 hasConceptScore W2023241955C49040817 @default.
• W2023241955 hasConceptScore W2023241955C69990965 @default.
• W2023241955 hasConceptScore W2023241955C71039073 @default.
• W2023241955 hasConceptScore W2023241955C71907059 @default.
• W2023241955 hasLocation W20232419551 @default.
• W2023241955 hasOpenAccess W2023241955 @default.
• W2023241955 hasPrimaryLocation W20232419551 @default.
• W2023241955 hasRelatedWork W1969330179 @default.
• W2023241955 hasRelatedWork W1996070892 @default.
• W2023241955 hasRelatedWork W2020567181 @default.
• W2023241955 hasRelatedWork W2067393306 @default.
• W2023241955 hasRelatedWork W2095553506 @default.

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