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• W2023243356 endingPage "4954" @default.
• W2023243356 startingPage "4949" @default.
• W2023243356 abstract "The implant isolation characteristics of highly doped n- and p-type GaAs epitaxial layers implanted with 5 MeV O+ ions are reported. High (∼108 Ω/⧠) sheet resistances are obtained in such layers following annealing at 550–600 °C for ion doses around 1015 cm−2. The residual conductivity is still due to hopping processes with small activation (50–70 meV) energies. The use of a single MeV O+ implant considerably simplifies the isolation of GaAs/AlGaAs heterojunction bipolar transistor (HBT) structures relative to the usual multiple-implant keV energy scheme. Small geometry (2×5 μm2) HBTs with gains of 25 for highly-doped (p=7×1019 cm−3) base layer structures have been fabricated using MeV implant isolation." @default.
• W2023243356 created "2016-06-24" @default.
• W2023243356 creator A5000217932 @default.
• W2023243356 creator A5005386557 @default.
• W2023243356 creator A5009604855 @default.
• W2023243356 creator A5010401223 @default.
• W2023243356 creator A5020967437 @default.
• W2023243356 creator A5024909821 @default.
• W2023243356 creator A5030770813 @default.
• W2023243356 creator A5034938802 @default.
• W2023243356 creator A5045216846 @default.
• W2023243356 creator A5068212478 @default.
• W2023243356 creator A5077738125 @default.
• W2023243356 creator A5085381025 @default.
• W2023243356 date "1992-05-15" @default.
• W2023243356 modified "2023-10-18" @default.
• W2023243356 title "Use of MeV O⁺ion implantation for isolation of GaAs/AlGaAs heterojunction bipolar transistors" @default.
• W2023243356 cites W1837863733 @default.
• W2023243356 cites W1978505808 @default.
• W2023243356 cites W1994584714 @default.
• W2023243356 cites W2015832198 @default.
• W2023243356 cites W2019343061 @default.
• W2023243356 cites W2022464103 @default.
• W2023243356 cites W2024172140 @default.
• W2023243356 cites W2024180452 @default.
• W2023243356 cites W2042965280 @default.
• W2023243356 cites W2047151447 @default.
• W2023243356 cites W2056992681 @default.
• W2023243356 cites W2061834358 @default.
• W2023243356 cites W2073031826 @default.
• W2023243356 cites W2074035518 @default.
• W2023243356 cites W2074152165 @default.
• W2023243356 cites W2091570649 @default.
• W2023243356 cites W2093258414 @default.
• W2023243356 cites W2122080965 @default.
• W2023243356 doi "https://doi.org/10.1063/1.350643" @default.
• W2023243356 hasPublicationYear "1992" @default.
• W2023243356 type Work @default.
• W2023243356 sameAs 2023243356 @default.
• W2023243356 citedByCount "21" @default.
• W2023243356 countsByYear W20232433562012 @default.
• W2023243356 crossrefType "journal-article" @default.
• W2023243356 hasAuthorship W2023243356A5000217932 @default.
• W2023243356 hasAuthorship W2023243356A5005386557 @default.
• W2023243356 hasAuthorship W2023243356A5009604855 @default.
• W2023243356 hasAuthorship W2023243356A5010401223 @default.
• W2023243356 hasAuthorship W2023243356A5020967437 @default.
• W2023243356 hasAuthorship W2023243356A5024909821 @default.
• W2023243356 hasAuthorship W2023243356A5030770813 @default.
• W2023243356 hasAuthorship W2023243356A5034938802 @default.
• W2023243356 hasAuthorship W2023243356A5045216846 @default.
• W2023243356 hasAuthorship W2023243356A5068212478 @default.
• W2023243356 hasAuthorship W2023243356A5077738125 @default.
• W2023243356 hasAuthorship W2023243356A5085381025 @default.
• W2023243356 hasConcept C110738630 @default.
• W2023243356 hasConcept C119599485 @default.
• W2023243356 hasConcept C127413603 @default.
• W2023243356 hasConcept C145148216 @default.
• W2023243356 hasConcept C159985019 @default.
• W2023243356 hasConcept C165801399 @default.
• W2023243356 hasConcept C171250308 @default.
• W2023243356 hasConcept C172385210 @default.
• W2023243356 hasConcept C173408217 @default.
• W2023243356 hasConcept C178790620 @default.
• W2023243356 hasConcept C185592680 @default.
• W2023243356 hasConcept C192562407 @default.
• W2023243356 hasConcept C23061349 @default.
• W2023243356 hasConcept C2777855556 @default.
• W2023243356 hasConcept C2779227376 @default.
• W2023243356 hasConcept C41823505 @default.
• W2023243356 hasConcept C49040817 @default.
• W2023243356 hasConcept C57863236 @default.
• W2023243356 hasConcept C79794668 @default.
• W2023243356 hasConceptScore W2023243356C110738630 @default.
• W2023243356 hasConceptScore W2023243356C119599485 @default.
• W2023243356 hasConceptScore W2023243356C127413603 @default.
• W2023243356 hasConceptScore W2023243356C145148216 @default.
• W2023243356 hasConceptScore W2023243356C159985019 @default.
• W2023243356 hasConceptScore W2023243356C165801399 @default.
• W2023243356 hasConceptScore W2023243356C171250308 @default.
• W2023243356 hasConceptScore W2023243356C172385210 @default.
• W2023243356 hasConceptScore W2023243356C173408217 @default.
• W2023243356 hasConceptScore W2023243356C178790620 @default.
• W2023243356 hasConceptScore W2023243356C185592680 @default.
• W2023243356 hasConceptScore W2023243356C192562407 @default.
• W2023243356 hasConceptScore W2023243356C23061349 @default.
• W2023243356 hasConceptScore W2023243356C2777855556 @default.
• W2023243356 hasConceptScore W2023243356C2779227376 @default.
• W2023243356 hasConceptScore W2023243356C41823505 @default.
• W2023243356 hasConceptScore W2023243356C49040817 @default.
• W2023243356 hasConceptScore W2023243356C57863236 @default.
• W2023243356 hasConceptScore W2023243356C79794668 @default.
• W2023243356 hasIssue "10" @default.
• W2023243356 hasLocation W20232433561 @default.
• W2023243356 hasOpenAccess W2023243356 @default.
• W2023243356 hasPrimaryLocation W20232433561 @default.
• W2023243356 hasRelatedWork W1675733803 @default.
• W2023243356 hasRelatedWork W1963651855 @default.

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