Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023271685> ?p ?o ?g. }
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- W2023271685 endingPage "2510" @default.
- W2023271685 startingPage "2506" @default.
- W2023271685 abstract "In this paper we describe a method to form NiSi contacts using electroless plating of Nickel or Ni alloy on Pd activated self-assembled monolayer (SAM) on p-type Si(1 0 0). Such method allows uniform deposition of very thin, <30 nm, Ni or Ni alloy films. Clean, oxide free, Si substrate was covered with aminopropyltriethoxysilane (APTES) self-assembled monolayer. The surface was activated with Pd–citrate solution followed by electroless plating. The samples were annealed for 1 h in vacuum (∼10−6 Torr) forming the silicide layer. The annealing temperatures were 400 °C for NiP alloy and 500 °C for NiPW alloy. X-ray diffraction (XRD) measurement confirmed the presence of NiSi phase after annealing. The silicides material properties were characterized using secondary electron microscopy (SEM) analysis, X-ray diffraction (XRD) and X-ray photon spectroscopy (XPS) profiling. The results are reported and summarized." @default.
- W2023271685 created "2016-06-24" @default.
- W2023271685 creator A5030256664 @default.
- W2023271685 creator A5036312303 @default.
- W2023271685 creator A5038105758 @default.
- W2023271685 creator A5049657512 @default.
- W2023271685 creator A5058600369 @default.
- W2023271685 date "2007-11-01" @default.
- W2023271685 modified "2023-09-27" @default.
- W2023271685 title "NiSi contact metallization using electroless Ni deposition on Pd-activated self-assembled monolayer (SAM) on p-type Si(100)" @default.
- W2023271685 cites W1967704265 @default.
- W2023271685 cites W1984121719 @default.
- W2023271685 cites W2011037584 @default.
- W2023271685 cites W2050152244 @default.
- W2023271685 cites W2075249463 @default.
- W2023271685 cites W2110567456 @default.
- W2023271685 cites W2166313944 @default.
- W2023271685 doi "https://doi.org/10.1016/j.mee.2007.05.067" @default.
- W2023271685 hasPublicationYear "2007" @default.
- W2023271685 type Work @default.
- W2023271685 sameAs 2023271685 @default.
- W2023271685 citedByCount "15" @default.
- W2023271685 countsByYear W20232716852012 @default.
- W2023271685 countsByYear W20232716852014 @default.
- W2023271685 countsByYear W20232716852015 @default.
- W2023271685 countsByYear W20232716852016 @default.
- W2023271685 countsByYear W20232716852020 @default.
- W2023271685 crossrefType "journal-article" @default.
- W2023271685 hasAuthorship W2023271685A5030256664 @default.
- W2023271685 hasAuthorship W2023271685A5036312303 @default.
- W2023271685 hasAuthorship W2023271685A5038105758 @default.
- W2023271685 hasAuthorship W2023271685A5049657512 @default.
- W2023271685 hasAuthorship W2023271685A5058600369 @default.
- W2023271685 hasConcept C113196181 @default.
- W2023271685 hasConcept C127413603 @default.
- W2023271685 hasConcept C159985019 @default.
- W2023271685 hasConcept C171250308 @default.
- W2023271685 hasConcept C175708663 @default.
- W2023271685 hasConcept C185592680 @default.
- W2023271685 hasConcept C191897082 @default.
- W2023271685 hasConcept C192562407 @default.
- W2023271685 hasConcept C26771246 @default.
- W2023271685 hasConcept C2777855556 @default.
- W2023271685 hasConcept C2780026712 @default.
- W2023271685 hasConcept C2780901251 @default.
- W2023271685 hasConcept C42360764 @default.
- W2023271685 hasConcept C43617362 @default.
- W2023271685 hasConcept C544956773 @default.
- W2023271685 hasConcept C7070889 @default.
- W2023271685 hasConceptScore W2023271685C113196181 @default.
- W2023271685 hasConceptScore W2023271685C127413603 @default.
- W2023271685 hasConceptScore W2023271685C159985019 @default.
- W2023271685 hasConceptScore W2023271685C171250308 @default.
- W2023271685 hasConceptScore W2023271685C175708663 @default.
- W2023271685 hasConceptScore W2023271685C185592680 @default.
- W2023271685 hasConceptScore W2023271685C191897082 @default.
- W2023271685 hasConceptScore W2023271685C192562407 @default.
- W2023271685 hasConceptScore W2023271685C26771246 @default.
- W2023271685 hasConceptScore W2023271685C2777855556 @default.
- W2023271685 hasConceptScore W2023271685C2780026712 @default.
- W2023271685 hasConceptScore W2023271685C2780901251 @default.
- W2023271685 hasConceptScore W2023271685C42360764 @default.
- W2023271685 hasConceptScore W2023271685C43617362 @default.
- W2023271685 hasConceptScore W2023271685C544956773 @default.
- W2023271685 hasConceptScore W2023271685C7070889 @default.
- W2023271685 hasIssue "11" @default.
- W2023271685 hasLocation W20232716851 @default.
- W2023271685 hasOpenAccess W2023271685 @default.
- W2023271685 hasPrimaryLocation W20232716851 @default.
- W2023271685 hasRelatedWork W1964511326 @default.
- W2023271685 hasRelatedWork W1988577681 @default.
- W2023271685 hasRelatedWork W2024405810 @default.
- W2023271685 hasRelatedWork W2135834532 @default.
- W2023271685 hasRelatedWork W2166940675 @default.
- W2023271685 hasRelatedWork W2375172051 @default.
- W2023271685 hasRelatedWork W2378404326 @default.
- W2023271685 hasRelatedWork W2531456261 @default.
- W2023271685 hasRelatedWork W4317393961 @default.
- W2023271685 hasRelatedWork W53530115 @default.
- W2023271685 hasVolume "84" @default.
- W2023271685 isParatext "false" @default.
- W2023271685 isRetracted "false" @default.
- W2023271685 magId "2023271685" @default.
- W2023271685 workType "article" @default.