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- W2023273037 abstract "The thermal stability of reactively sputtered RuO2 films is investigated from the point of view of their application as diffusion barriers in silicon contact metallizations with an Al overlayer. Backscattering spectra of Si/RuO2/Al samples and electrical measurements on shallow junction diodes with 〈Si〉/TiSi2.3/RuO2/Al contacts both show that RuO2 films are effective diffusion barriers between Al and Si for 30-min annealing at temperatures as high as 600 °C." @default.
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- W2023273037 date "1987-03-30" @default.
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- W2023273037 title "Reactively sputtered RuO<sub>2</sub>diffusion barriers" @default.
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- W2023273037 doi "https://doi.org/10.1063/1.98012" @default.
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