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- W2023279771 abstract "Annealing effects have been studied for thin-film transistors (TFTs) with excimer-laser recrystallized large-grain poly-Si films. Electron field-effect mobility of about 350 cm 2 /V·s, i.e., much higher than the typical value, can be obtained by simple vacuum anneal. Effects of atomic hydrogen and molecular hydrogen anneals are also identified." @default.
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- W2023279771 title "The Annealing Effects of Excimer-Laser-Produced Large-Grain Poly-Si Thin-Film Transistors" @default.
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- W2023279771 doi "https://doi.org/10.1143/jjap.33.l83" @default.
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