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- W2023283358 abstract "The fabrication and characteristics of a micromachined chromium nitride (Cr‐N) thin‐film pressure sensor with high overpressure tolerance for high temperature applications are presented. The proposed pressure sensor consists of a Cr‐N thin‐film, patterned after a Wheatstone bridge configuration, and then sputter‐deposited onto thermally oxidised Si membranes with a buried cavity for overpressure tolerance and an Al interconnection layer. This device is very suitable for high temperature integrated pressure sensors." @default.
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- W2023283358 date "2006-01-01" @default.
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- W2023283358 title "Micromachined chromium nitride thin-film pressure sensor for high temperature applications" @default.
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- W2023283358 doi "https://doi.org/10.1049/el:20061169" @default.
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