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- W2023286200 abstract "The initial stage of the reaction of dichlorosilane (SiH2Cl2) with the Si(111)-(7×7) surface under exposure below 1 L is investigated using a scanning tunneling microscope (STM). We found that corner adatoms are preferentially reacted over the center adatoms at the very beginning of exposure. The initial reaction process of SiH2Cl2 with Si(111)-(7×7) surface is discussed. It is suggested that the preferential reactivity of a corner-hole atom is reduced as the exposure increases, which may give rise to reacted rest atoms." @default.
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- W2023286200 date "1998-06-01" @default.
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- W2023286200 title "Scanning tunneling microscopy study of the initial reaction of SiH2Cl2 molecules with the Si(111)-7×7 surface" @default.
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- W2023286200 doi "https://doi.org/10.1016/s0169-4332(98)00019-1" @default.
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