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- W2023301910 abstract "We report the use of 500 nm thick silicon nitride membrane as a high reflective broad-band filter in the orange-red spectral range. The membrane is patterned into a high contrast grating with 560 nm period to act as a high-reflectivity mirror. Using electrostatic tuning, we have achieved a tunable filter based on a Fabry-Perot cavity architecture. By applying 9 V to the MEMs device, we observe a 13 nm wavelength shift of a peak centred at 630 nm." @default.
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- W2023301910 date "2014-08-01" @default.
- W2023301910 modified "2023-09-26" @default.
- W2023301910 title "Tunable optical filters based on silicon nitride mem-branes with subwavelength gratings" @default.
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- W2023301910 doi "https://doi.org/10.1109/omn.2014.6924515" @default.
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