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- W2023302610 endingPage "2346" @default.
- W2023302610 startingPage "2342" @default.
- W2023302610 abstract "In traditional interference lithography, interference fringes are typically phase locked to a stationary substrate using analog homodyne photodiode signals that are fed back to control a phase-shifting device such as an electro-optic modulator or a piezoelectrically transduced mirror. Commercially available fringe-locking systems based on this approach often achieve stability of the interference fringes to within a small fraction of the fringe period p (typically ±p/20 peak-to-peak). We describe the performance of a heterodyne fringe control system utilizing acousto-optic phase shifters and digital controls that is designed to satisfy the much more stringent fringe control requirements for scanning beam interference lithography. We demonstrate locking to ±p/100, and expect further significant improvements. This versatile system can also be used to lock the phase of moving fringes in almost arbitrary fashion at fringe velocities up to 2.5×107 periods/s and to measure the phase of gratings." @default.
- W2023302610 created "2016-06-24" @default.
- W2023302610 creator A5003265874 @default.
- W2023302610 creator A5024958276 @default.
- W2023302610 creator A5046018402 @default.
- W2023302610 creator A5069472851 @default.
- W2023302610 creator A5090013098 @default.
- W2023302610 date "2001-11-01" @default.
- W2023302610 modified "2023-10-16" @default.
- W2023302610 title "Digital heterodyne interference fringe control system" @default.
- W2023302610 cites W1964659524 @default.
- W2023302610 cites W1969112700 @default.
- W2023302610 cites W2000638048 @default.
- W2023302610 cites W2006261293 @default.
- W2023302610 cites W2027773797 @default.
- W2023302610 cites W2082305716 @default.
- W2023302610 cites W2085517610 @default.
- W2023302610 cites W2093664162 @default.
- W2023302610 cites W2099894311 @default.
- W2023302610 cites W2159697803 @default.
- W2023302610 cites W2162945251 @default.
- W2023302610 doi "https://doi.org/10.1116/1.1410096" @default.
- W2023302610 hasPublicationYear "2001" @default.
- W2023302610 type Work @default.
- W2023302610 sameAs 2023302610 @default.
- W2023302610 citedByCount "31" @default.
- W2023302610 countsByYear W20233026102012 @default.
- W2023302610 countsByYear W20233026102014 @default.
- W2023302610 countsByYear W20233026102017 @default.
- W2023302610 countsByYear W20233026102018 @default.
- W2023302610 countsByYear W20233026102019 @default.
- W2023302610 countsByYear W20233026102020 @default.
- W2023302610 countsByYear W20233026102021 @default.
- W2023302610 countsByYear W20233026102022 @default.
- W2023302610 countsByYear W20233026102023 @default.
- W2023302610 crossrefType "journal-article" @default.
- W2023302610 hasAuthorship W2023302610A5003265874 @default.
- W2023302610 hasAuthorship W2023302610A5024958276 @default.
- W2023302610 hasAuthorship W2023302610A5046018402 @default.
- W2023302610 hasAuthorship W2023302610A5069472851 @default.
- W2023302610 hasAuthorship W2023302610A5090013098 @default.
- W2023302610 hasConcept C120665830 @default.
- W2023302610 hasConcept C121332964 @default.
- W2023302610 hasConcept C127162648 @default.
- W2023302610 hasConcept C136525101 @default.
- W2023302610 hasConcept C142724271 @default.
- W2023302610 hasConcept C159395582 @default.
- W2023302610 hasConcept C204223013 @default.
- W2023302610 hasConcept C204787440 @default.
- W2023302610 hasConcept C24890656 @default.
- W2023302610 hasConcept C2780497637 @default.
- W2023302610 hasConcept C32022120 @default.
- W2023302610 hasConcept C41008148 @default.
- W2023302610 hasConcept C44280652 @default.
- W2023302610 hasConcept C62520636 @default.
- W2023302610 hasConcept C71924100 @default.
- W2023302610 hasConcept C751236 @default.
- W2023302610 hasConcept C76155785 @default.
- W2023302610 hasConceptScore W2023302610C120665830 @default.
- W2023302610 hasConceptScore W2023302610C121332964 @default.
- W2023302610 hasConceptScore W2023302610C127162648 @default.
- W2023302610 hasConceptScore W2023302610C136525101 @default.
- W2023302610 hasConceptScore W2023302610C142724271 @default.
- W2023302610 hasConceptScore W2023302610C159395582 @default.
- W2023302610 hasConceptScore W2023302610C204223013 @default.
- W2023302610 hasConceptScore W2023302610C204787440 @default.
- W2023302610 hasConceptScore W2023302610C24890656 @default.
- W2023302610 hasConceptScore W2023302610C2780497637 @default.
- W2023302610 hasConceptScore W2023302610C32022120 @default.
- W2023302610 hasConceptScore W2023302610C41008148 @default.
- W2023302610 hasConceptScore W2023302610C44280652 @default.
- W2023302610 hasConceptScore W2023302610C62520636 @default.
- W2023302610 hasConceptScore W2023302610C71924100 @default.
- W2023302610 hasConceptScore W2023302610C751236 @default.
- W2023302610 hasConceptScore W2023302610C76155785 @default.
- W2023302610 hasIssue "6" @default.
- W2023302610 hasLocation W20233026101 @default.
- W2023302610 hasOpenAccess W2023302610 @default.
- W2023302610 hasPrimaryLocation W20233026101 @default.
- W2023302610 hasRelatedWork W1966335330 @default.
- W2023302610 hasRelatedWork W2008005668 @default.
- W2023302610 hasRelatedWork W2015894879 @default.
- W2023302610 hasRelatedWork W2058948105 @default.
- W2023302610 hasRelatedWork W2066174673 @default.
- W2023302610 hasRelatedWork W2157251016 @default.
- W2023302610 hasRelatedWork W2330515708 @default.
- W2023302610 hasRelatedWork W3096946692 @default.
- W2023302610 hasRelatedWork W4367179021 @default.
- W2023302610 hasRelatedWork W2091963826 @default.
- W2023302610 hasVolume "19" @default.
- W2023302610 isParatext "false" @default.
- W2023302610 isRetracted "false" @default.
- W2023302610 magId "2023302610" @default.
- W2023302610 workType "article" @default.