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- W2023336178 abstract "A liquid P doping source was prepared by adding P compounds to tetraethylorthosilicate in organic solvent solution. The thicknesses of the spin‐on applied silica films are observed to be linearly proportional to the P concentration in the solution in the range of 1.6–25.0 g/l. In the same range, the plot of vs. P concentration in the solution shows two distinct linear regions. After 40 min of isochronal diffusion under in the temperature range of 850°–1115°C, the plots of vs. change from linear to nonlinear dependence, in the direction approaching independence, as increases. The current diffusion models for a doped oxide source are shown to predict the Si‐silicon oxide interfacial mass transport phenomena only at weight percent and at . The calculated 's, from the Arrhenius plots of and , are in the range of values that have been reported in the literature. Besides showing a dependence, the 's also show a definite data, i.e., and , dependence and a possible temperature dependence." @default.
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- W2023336178 date "1979-07-01" @default.
- W2023336178 modified "2023-09-25" @default.
- W2023336178 title "Phosphorus Diffusion in Silicon from a Spin‐on P‐Doped Silicon Oxide Film" @default.
- W2023336178 doi "https://doi.org/10.1149/1.2129251" @default.
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