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- W2023339497 abstract "We have designed two kinds of cantilever MEMS switches based on two-stage driving. These micro-switches can mitigate tip-first-touching of the contact part and expected to have a long lifetime. Moreover, the driving voltage is low while keeping the device miniaturization. The RF characteristics of insertion loss and isolation are calculated and shown to be excellent. The micro-switches are fabricated by silicon deep dry etching using an SOI wafer and then electrostatic bonding onto a glass substrate. This process is fairly simple and confirmed to be able to fabricate two electrode gaps precisely." @default.
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- W2023339497 date "2006-01-01" @default.
- W2023339497 modified "2023-10-18" @default.
- W2023339497 title "Design and Fabrication of Two-Stage-Driven Cantilever-Based RF MEMS Micro-Switch" @default.
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- W2023339497 doi "https://doi.org/10.1541/ieejsmas.126.352" @default.
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