Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023342020> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W2023342020 endingPage "1043" @default.
- W2023342020 startingPage "1036" @default.
- W2023342020 abstract "This paper presents a robust fabrication technique for manufacturing ultrasensitive micromechanical capacitive accelerometers in thick silicon-on-insulator substrates. The inertial mass of the sensor is significantly increased by keeping the full thickness of the handle layer attached to the top layer proof mass. High-aspect-ratio capacitive sense gaps are fabricated by depositing a layer of polysilicon on the sidewalls of low aspect- ratio trenches etched in silicon. Using this method, requirements on trench etching are relaxed, whereas the performance is preserved through the gap reduction technique. Therefore, this process flow can potentially enable accelerometers with capacitive gap aspect-ratio values of greater than 40:1, not easily realizable using conventional dry etching equipment. Also, no wet-etching step is involved in this process which in turn facilitates the fabrication of very sensitive motion sensors that utilize very compliant mechanical structures. Sub-micro-gravity in-plane accelerometers are fabricated and tested with measured sensitivity of 35 pF/g, bias instability of 8 mug, and footprint of <0.5 cm2." @default.
- W2023342020 created "2016-06-24" @default.
- W2023342020 creator A5004662031 @default.
- W2023342020 creator A5037320630 @default.
- W2023342020 creator A5081523432 @default.
- W2023342020 date "2007-10-01" @default.
- W2023342020 modified "2023-09-25" @default.
- W2023342020 title "Sub-Micro-Gravity In-Plane Accelerometers With Reduced Capacitive Gaps and Extra Seismic Mass" @default.
- W2023342020 cites W1580954366 @default.
- W2023342020 cites W1601751208 @default.
- W2023342020 cites W1853430445 @default.
- W2023342020 cites W2003469080 @default.
- W2023342020 cites W2026224585 @default.
- W2023342020 cites W2040212024 @default.
- W2023342020 cites W2096635811 @default.
- W2023342020 cites W2101952869 @default.
- W2023342020 cites W2117606422 @default.
- W2023342020 cites W2118982144 @default.
- W2023342020 cites W2152588671 @default.
- W2023342020 cites W2164773376 @default.
- W2023342020 doi "https://doi.org/10.1109/jmems.2007.900879" @default.
- W2023342020 hasPublicationYear "2007" @default.
- W2023342020 type Work @default.
- W2023342020 sameAs 2023342020 @default.
- W2023342020 citedByCount "115" @default.
- W2023342020 countsByYear W20233420202012 @default.
- W2023342020 countsByYear W20233420202013 @default.
- W2023342020 countsByYear W20233420202014 @default.
- W2023342020 countsByYear W20233420202015 @default.
- W2023342020 countsByYear W20233420202016 @default.
- W2023342020 countsByYear W20233420202017 @default.
- W2023342020 countsByYear W20233420202018 @default.
- W2023342020 countsByYear W20233420202019 @default.
- W2023342020 countsByYear W20233420202020 @default.
- W2023342020 countsByYear W20233420202021 @default.
- W2023342020 countsByYear W20233420202022 @default.
- W2023342020 countsByYear W20233420202023 @default.
- W2023342020 crossrefType "journal-article" @default.
- W2023342020 hasAuthorship W2023342020A5004662031 @default.
- W2023342020 hasAuthorship W2023342020A5037320630 @default.
- W2023342020 hasAuthorship W2023342020A5081523432 @default.
- W2023342020 hasConcept C119599485 @default.
- W2023342020 hasConcept C121332964 @default.
- W2023342020 hasConcept C127313418 @default.
- W2023342020 hasConcept C127413603 @default.
- W2023342020 hasConcept C13280743 @default.
- W2023342020 hasConcept C17825722 @default.
- W2023342020 hasConcept C192562407 @default.
- W2023342020 hasConcept C206755178 @default.
- W2023342020 hasConcept C24890656 @default.
- W2023342020 hasConcept C2524010 @default.
- W2023342020 hasConcept C33923547 @default.
- W2023342020 hasConcept C62520636 @default.
- W2023342020 hasConcept C66938386 @default.
- W2023342020 hasConcept C89805583 @default.
- W2023342020 hasConceptScore W2023342020C119599485 @default.
- W2023342020 hasConceptScore W2023342020C121332964 @default.
- W2023342020 hasConceptScore W2023342020C127313418 @default.
- W2023342020 hasConceptScore W2023342020C127413603 @default.
- W2023342020 hasConceptScore W2023342020C13280743 @default.
- W2023342020 hasConceptScore W2023342020C17825722 @default.
- W2023342020 hasConceptScore W2023342020C192562407 @default.
- W2023342020 hasConceptScore W2023342020C206755178 @default.
- W2023342020 hasConceptScore W2023342020C24890656 @default.
- W2023342020 hasConceptScore W2023342020C2524010 @default.
- W2023342020 hasConceptScore W2023342020C33923547 @default.
- W2023342020 hasConceptScore W2023342020C62520636 @default.
- W2023342020 hasConceptScore W2023342020C66938386 @default.
- W2023342020 hasConceptScore W2023342020C89805583 @default.
- W2023342020 hasIssue "5" @default.
- W2023342020 hasLocation W20233420201 @default.
- W2023342020 hasOpenAccess W2023342020 @default.
- W2023342020 hasPrimaryLocation W20233420201 @default.
- W2023342020 hasRelatedWork W1965527644 @default.
- W2023342020 hasRelatedWork W1990002913 @default.
- W2023342020 hasRelatedWork W1996653234 @default.
- W2023342020 hasRelatedWork W2136435912 @default.
- W2023342020 hasRelatedWork W2160325238 @default.
- W2023342020 hasRelatedWork W2189387457 @default.
- W2023342020 hasRelatedWork W2375245455 @default.
- W2023342020 hasRelatedWork W2502505565 @default.
- W2023342020 hasRelatedWork W2902633157 @default.
- W2023342020 hasRelatedWork W756886103 @default.
- W2023342020 hasVolume "16" @default.
- W2023342020 isParatext "false" @default.
- W2023342020 isRetracted "false" @default.
- W2023342020 magId "2023342020" @default.
- W2023342020 workType "article" @default.