Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023346974> ?p ?o ?g. }
Showing items 1 to 85 of
85
with 100 items per page.
- W2023346974 abstract "We report on micromirror arrays being developed for object selection in Multi Object Spectrographs for astronomical applications. The micromirrors are etched in bulk single crystal silicon whereas the cantilever type suspension is realized by surface micromachining. One micromirror element is 100μm × 200μm in size. The micromirrors are actuated electrostatically by electrodes located on a second chip. The use of silicon on insulator (SOI) wafers for both mirror and electrode chip ensures thermal compatibility for cryogenic operation. A system of multiple landing beams has been developed, which passively locks the mirror at a well defined tilt angle when actuated. The mechanical tilt angle obtained is 20° at a pull-in voltage of 90V. Measurements with an optical profiler showed that the tilt angle of the actuated and locked mirror is stable with a precision of one arc minute over a range of 15V. This locking system makes the tilt angle merely independent from process variations across the wafer and thus provides uniform tilt angle over the whole array. The precision on tilt angle from mirror to mirror measured is one arc minute. The surface quality of the mirrors in actuated state is better than 10nm peak-to-valley and the local roughness is around 1nm RMS. Preliminary cryogenic tests showed that the micromirror device sustains 120K without any structural damage." @default.
- W2023346974 created "2016-06-24" @default.
- W2023346974 creator A5001237753 @default.
- W2023346974 creator A5008502701 @default.
- W2023346974 creator A5035063055 @default.
- W2023346974 creator A5036365000 @default.
- W2023346974 creator A5069581235 @default.
- W2023346974 creator A5086783853 @default.
- W2023346974 date "2007-10-08" @default.
- W2023346974 modified "2023-09-23" @default.
- W2023346974 title "Micromirror arrays for object selection" @default.
- W2023346974 doi "https://doi.org/10.1117/12.754184" @default.
- W2023346974 hasPublicationYear "2007" @default.
- W2023346974 type Work @default.
- W2023346974 sameAs 2023346974 @default.
- W2023346974 citedByCount "3" @default.
- W2023346974 countsByYear W20233469742021 @default.
- W2023346974 crossrefType "proceedings-article" @default.
- W2023346974 hasAuthorship W2023346974A5001237753 @default.
- W2023346974 hasAuthorship W2023346974A5008502701 @default.
- W2023346974 hasAuthorship W2023346974A5035063055 @default.
- W2023346974 hasAuthorship W2023346974A5036365000 @default.
- W2023346974 hasAuthorship W2023346974A5069581235 @default.
- W2023346974 hasAuthorship W2023346974A5086783853 @default.
- W2023346974 hasConcept C107365816 @default.
- W2023346974 hasConcept C120665830 @default.
- W2023346974 hasConcept C121332964 @default.
- W2023346974 hasConcept C127413603 @default.
- W2023346974 hasConcept C132771110 @default.
- W2023346974 hasConcept C136525101 @default.
- W2023346974 hasConcept C141354745 @default.
- W2023346974 hasConcept C142724271 @default.
- W2023346974 hasConcept C145667562 @default.
- W2023346974 hasConcept C159985019 @default.
- W2023346974 hasConcept C160671074 @default.
- W2023346974 hasConcept C17525397 @default.
- W2023346974 hasConcept C192562407 @default.
- W2023346974 hasConcept C204787440 @default.
- W2023346974 hasConcept C2779844322 @default.
- W2023346974 hasConcept C37977207 @default.
- W2023346974 hasConcept C49040817 @default.
- W2023346974 hasConcept C53143962 @default.
- W2023346974 hasConcept C544956773 @default.
- W2023346974 hasConcept C62520636 @default.
- W2023346974 hasConcept C71924100 @default.
- W2023346974 hasConcept C78519656 @default.
- W2023346974 hasConceptScore W2023346974C107365816 @default.
- W2023346974 hasConceptScore W2023346974C120665830 @default.
- W2023346974 hasConceptScore W2023346974C121332964 @default.
- W2023346974 hasConceptScore W2023346974C127413603 @default.
- W2023346974 hasConceptScore W2023346974C132771110 @default.
- W2023346974 hasConceptScore W2023346974C136525101 @default.
- W2023346974 hasConceptScore W2023346974C141354745 @default.
- W2023346974 hasConceptScore W2023346974C142724271 @default.
- W2023346974 hasConceptScore W2023346974C145667562 @default.
- W2023346974 hasConceptScore W2023346974C159985019 @default.
- W2023346974 hasConceptScore W2023346974C160671074 @default.
- W2023346974 hasConceptScore W2023346974C17525397 @default.
- W2023346974 hasConceptScore W2023346974C192562407 @default.
- W2023346974 hasConceptScore W2023346974C204787440 @default.
- W2023346974 hasConceptScore W2023346974C2779844322 @default.
- W2023346974 hasConceptScore W2023346974C37977207 @default.
- W2023346974 hasConceptScore W2023346974C49040817 @default.
- W2023346974 hasConceptScore W2023346974C53143962 @default.
- W2023346974 hasConceptScore W2023346974C544956773 @default.
- W2023346974 hasConceptScore W2023346974C62520636 @default.
- W2023346974 hasConceptScore W2023346974C71924100 @default.
- W2023346974 hasConceptScore W2023346974C78519656 @default.
- W2023346974 hasLocation W20233469741 @default.
- W2023346974 hasOpenAccess W2023346974 @default.
- W2023346974 hasPrimaryLocation W20233469741 @default.
- W2023346974 hasRelatedWork W139592794 @default.
- W2023346974 hasRelatedWork W1536397480 @default.
- W2023346974 hasRelatedWork W1946860411 @default.
- W2023346974 hasRelatedWork W1981865689 @default.
- W2023346974 hasRelatedWork W2010481829 @default.
- W2023346974 hasRelatedWork W2037859925 @default.
- W2023346974 hasRelatedWork W2082608377 @default.
- W2023346974 hasRelatedWork W2153911340 @default.
- W2023346974 hasRelatedWork W2623900224 @default.
- W2023346974 hasRelatedWork W4225089255 @default.
- W2023346974 isParatext "false" @default.
- W2023346974 isRetracted "false" @default.
- W2023346974 magId "2023346974" @default.
- W2023346974 workType "article" @default.