Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023348916> ?p ?o ?g. }
Showing items 1 to 75 of
75
with 100 items per page.
- W2023348916 endingPage "716" @default.
- W2023348916 startingPage "716" @default.
- W2023348916 abstract "The electrical properties of LPCVD silicon are shown to be optimised for microelectronic applications by depositing the films as an amorphous layer and annealing to yield a polycrystalline form. The film resistivity is lowered and the piezoresistive coefficient raised by this technique. These improvements are explained by a simple theory which incorporates trap density and grain size effects and also allows the temperature coefficients of resistance and gauge factor to be calculated." @default.
- W2023348916 created "2016-06-24" @default.
- W2023348916 creator A5022651335 @default.
- W2023348916 date "1986-01-01" @default.
- W2023348916 modified "2023-10-17" @default.
- W2023348916 title "Effect of deposition temperature on LPCVD polysilicon" @default.
- W2023348916 doi "https://doi.org/10.1049/el:19860490" @default.
- W2023348916 hasPublicationYear "1986" @default.
- W2023348916 type Work @default.
- W2023348916 sameAs 2023348916 @default.
- W2023348916 citedByCount "9" @default.
- W2023348916 countsByYear W20233489162021 @default.
- W2023348916 crossrefType "journal-article" @default.
- W2023348916 hasAuthorship W2023348916A5022651335 @default.
- W2023348916 hasConcept C119599485 @default.
- W2023348916 hasConcept C127413603 @default.
- W2023348916 hasConcept C159985019 @default.
- W2023348916 hasConcept C16643434 @default.
- W2023348916 hasConcept C185592680 @default.
- W2023348916 hasConcept C187937830 @default.
- W2023348916 hasConcept C192191005 @default.
- W2023348916 hasConcept C192562407 @default.
- W2023348916 hasConcept C2776390347 @default.
- W2023348916 hasConcept C2777855556 @default.
- W2023348916 hasConcept C2779227376 @default.
- W2023348916 hasConcept C2779667780 @default.
- W2023348916 hasConcept C2780565262 @default.
- W2023348916 hasConcept C49040817 @default.
- W2023348916 hasConcept C544956773 @default.
- W2023348916 hasConcept C56052488 @default.
- W2023348916 hasConcept C57410435 @default.
- W2023348916 hasConcept C69990965 @default.
- W2023348916 hasConcept C8010536 @default.
- W2023348916 hasConcept C87359718 @default.
- W2023348916 hasConceptScore W2023348916C119599485 @default.
- W2023348916 hasConceptScore W2023348916C127413603 @default.
- W2023348916 hasConceptScore W2023348916C159985019 @default.
- W2023348916 hasConceptScore W2023348916C16643434 @default.
- W2023348916 hasConceptScore W2023348916C185592680 @default.
- W2023348916 hasConceptScore W2023348916C187937830 @default.
- W2023348916 hasConceptScore W2023348916C192191005 @default.
- W2023348916 hasConceptScore W2023348916C192562407 @default.
- W2023348916 hasConceptScore W2023348916C2776390347 @default.
- W2023348916 hasConceptScore W2023348916C2777855556 @default.
- W2023348916 hasConceptScore W2023348916C2779227376 @default.
- W2023348916 hasConceptScore W2023348916C2779667780 @default.
- W2023348916 hasConceptScore W2023348916C2780565262 @default.
- W2023348916 hasConceptScore W2023348916C49040817 @default.
- W2023348916 hasConceptScore W2023348916C544956773 @default.
- W2023348916 hasConceptScore W2023348916C56052488 @default.
- W2023348916 hasConceptScore W2023348916C57410435 @default.
- W2023348916 hasConceptScore W2023348916C69990965 @default.
- W2023348916 hasConceptScore W2023348916C8010536 @default.
- W2023348916 hasConceptScore W2023348916C87359718 @default.
- W2023348916 hasIssue "13" @default.
- W2023348916 hasLocation W20233489161 @default.
- W2023348916 hasOpenAccess W2023348916 @default.
- W2023348916 hasPrimaryLocation W20233489161 @default.
- W2023348916 hasRelatedWork W1021046056 @default.
- W2023348916 hasRelatedWork W1970856739 @default.
- W2023348916 hasRelatedWork W2031095413 @default.
- W2023348916 hasRelatedWork W2041833038 @default.
- W2023348916 hasRelatedWork W2091249699 @default.
- W2023348916 hasRelatedWork W2158032893 @default.
- W2023348916 hasRelatedWork W2322012993 @default.
- W2023348916 hasRelatedWork W2380698479 @default.
- W2023348916 hasRelatedWork W756186929 @default.
- W2023348916 hasRelatedWork W218620776 @default.
- W2023348916 hasVolume "22" @default.
- W2023348916 isParatext "false" @default.
- W2023348916 isRetracted "false" @default.
- W2023348916 magId "2023348916" @default.
- W2023348916 workType "article" @default.