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- W2023351785 abstract "The technology for self-supported membraneless polycrystalline SiGe thermal microemitters, their design, and performance are presented. The 128-element arrays with a fill factor of 88% and a 2.5-μm-thick resonant cavity have been grown by low-pressure chemical vapor deposition and fabricated using surface micromachining technology. The 200-nm-thick 60×60 μm2 emitting pixels enforced with a U-shape profile pattern demonstrate a thermal time constant of 2–7 ms and an apparent temperature of 700 K in the 3–5 and 8–12 μm atmospheric transparency windows. The application of the devices to the infrared dynamic scene simulation and their benefit over conventional planar membrane-supported emitters are discussed." @default.
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- W2023351785 date "2009-05-25" @default.
- W2023351785 modified "2023-09-30" @default.
- W2023351785 title "Micromachined single-level nonplanar polycrystalline SiGe thermal microemitters for infrared dynamic scene projection" @default.
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- W2023351785 doi "https://doi.org/10.1063/1.3148645" @default.
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