FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023353097> ?p ?o ?g. }

• W2023353097 endingPage "27" @default.
• W2023353097 startingPage "23" @default.
• W2023353097 abstract "본 연구에서는 상온에서 RF 마그네트론 스퍼터링 법으로 유리 기판위에 증착된 Ga 도핑 된 다결정 ZnO 박막의 특성을 개선하기 위하여 적정 열처리 조건을 분석하였다. 먼저 박막 성장 후 박막의 특성을 분석하였고 각각 <TEX>$400{sim}600^{circ}C$</TEX>에서 30분, 60분간 질소 분위기에서 열처리를 한 후 구조적, 광학적 특성을 평가하였다. XRD와 FE-SEM을 사용하여 열처리온도 변화에 따른 결정입자의 크기의 변화를 관찰하였다. 그 결과 성장된 결정의 크기의 증가와 박막의 결정성이 향상되었음을 확인할 수 있었으며 그로 인해 박막 특성을 중시하는 투명 전도막의 투과도의 향상 또한 확인할 수 있었다. 결론적으로, 본 실험을 통하여 ZnO 성장 후 적절한 열처리를 수행함으로서 GZO 박막을 사용하여 제작된 소자의 특성을 개선할 수 있으리라 판단된다. We have investigated the effect of annealing on the structural and optical properties of polycrystalline Ga doped ZnO (GZO) films grown on glass substrates by RF-magnetron sputter at room temperature. The structural and optical properties of as-grown GZO films were characterized and then samples were annealed at <TEX>$400{sim}600^{circ}C$</TEX> in <TEX>$N_2$</TEX> ambient for 30, 60 minutes, respectively. The field emission scanning electron microscopy (FE-SEM) and X-ray diffraction (XRD) were used to measure the grain size and the crystalline quality of the films. We found that the crystalline quality was improved and the grain size tends to be increased. The optical properties of GZO thin films were analyzed by UV-VIS-NIR spectrophotometers. It is found that optical properties of thin films are increased by annealing and can be used for transparent electrode application. We believe that the appropriate post-growth heat treatment could be contributed to the improvement of GZO-based devices." @default.
• W2023353097 created "2016-06-24" @default.
• W2023353097 creator A5013256538 @default.
• W2023353097 creator A5013775431 @default.
• W2023353097 creator A5014756941 @default.
• W2023353097 creator A5032724729 @default.
• W2023353097 creator A5039323652 @default.
• W2023353097 creator A5058521969 @default.
• W2023353097 creator A5084023380 @default.
• W2023353097 date "2008-01-30" @default.
• W2023353097 modified "2023-10-03" @default.
• W2023353097 title "Structural and optical properties of heat-treated Ga doped ZnO thin films grown on glass substrate by RF magnetron sputtering" @default.
• W2023353097 cites W1964742179 @default.
• W2023353097 cites W1976227028 @default.
• W2023353097 cites W1994283573 @default.
• W2023353097 cites W1999589524 @default.
• W2023353097 cites W2007139933 @default.
• W2023353097 cites W2039336449 @default.
• W2023353097 cites W2041539361 @default.
• W2023353097 cites W2056772143 @default.
• W2023353097 cites W2078502725 @default.
• W2023353097 cites W2080182970 @default.
• W2023353097 cites W2080467034 @default.
• W2023353097 cites W2081018457 @default.
• W2023353097 cites W2134960271 @default.
• W2023353097 cites W2171307298 @default.
• W2023353097 doi "https://doi.org/10.5757/jkvs.2008.17.1.023" @default.
• W2023353097 hasPublicationYear "2008" @default.
• W2023353097 type Work @default.
• W2023353097 sameAs 2023353097 @default.
• W2023353097 citedByCount "1" @default.
• W2023353097 crossrefType "journal-article" @default.
• W2023353097 hasAuthorship W2023353097A5013256538 @default.
• W2023353097 hasAuthorship W2023353097A5013775431 @default.
• W2023353097 hasAuthorship W2023353097A5014756941 @default.
• W2023353097 hasAuthorship W2023353097A5032724729 @default.
• W2023353097 hasAuthorship W2023353097A5039323652 @default.
• W2023353097 hasAuthorship W2023353097A5058521969 @default.
• W2023353097 hasAuthorship W2023353097A5084023380 @default.
• W2023353097 hasBestOaLocation W20233530971 @default.
• W2023353097 hasConcept C111368507 @default.
• W2023353097 hasConcept C113196181 @default.
• W2023353097 hasConcept C123408415 @default.
• W2023353097 hasConcept C127313418 @default.
• W2023353097 hasConcept C137637335 @default.
• W2023353097 hasConcept C159985019 @default.
• W2023353097 hasConcept C171250308 @default.
• W2023353097 hasConcept C185592680 @default.
• W2023353097 hasConcept C19067145 @default.
• W2023353097 hasConcept C191897082 @default.
• W2023353097 hasConcept C192191005 @default.
• W2023353097 hasConcept C192562407 @default.
• W2023353097 hasConcept C22423302 @default.
• W2023353097 hasConcept C26771246 @default.
• W2023353097 hasConcept C2777289219 @default.
• W2023353097 hasConcept C2777855556 @default.
• W2023353097 hasConcept C43617362 @default.
• W2023353097 hasConcept C49040817 @default.
• W2023353097 hasConcept C57863236 @default.
• W2023353097 hasConcept C61427134 @default.
• W2023353097 hasConceptScore W2023353097C111368507 @default.
• W2023353097 hasConceptScore W2023353097C113196181 @default.
• W2023353097 hasConceptScore W2023353097C123408415 @default.
• W2023353097 hasConceptScore W2023353097C127313418 @default.
• W2023353097 hasConceptScore W2023353097C137637335 @default.
• W2023353097 hasConceptScore W2023353097C159985019 @default.
• W2023353097 hasConceptScore W2023353097C171250308 @default.
• W2023353097 hasConceptScore W2023353097C185592680 @default.
• W2023353097 hasConceptScore W2023353097C19067145 @default.
• W2023353097 hasConceptScore W2023353097C191897082 @default.
• W2023353097 hasConceptScore W2023353097C192191005 @default.
• W2023353097 hasConceptScore W2023353097C192562407 @default.
• W2023353097 hasConceptScore W2023353097C22423302 @default.
• W2023353097 hasConceptScore W2023353097C26771246 @default.
• W2023353097 hasConceptScore W2023353097C2777289219 @default.
• W2023353097 hasConceptScore W2023353097C2777855556 @default.
• W2023353097 hasConceptScore W2023353097C43617362 @default.
• W2023353097 hasConceptScore W2023353097C49040817 @default.
• W2023353097 hasConceptScore W2023353097C57863236 @default.
• W2023353097 hasConceptScore W2023353097C61427134 @default.
• W2023353097 hasIssue "1" @default.
• W2023353097 hasLocation W20233530971 @default.
• W2023353097 hasOpenAccess W2023353097 @default.
• W2023353097 hasPrimaryLocation W20233530971 @default.
• W2023353097 hasRelatedWork W1995810423 @default.
• W2023353097 hasRelatedWork W2014950863 @default.
• W2023353097 hasRelatedWork W2052710927 @default.
• W2023353097 hasRelatedWork W2062459093 @default.
• W2023353097 hasRelatedWork W2349844621 @default.
• W2023353097 hasRelatedWork W2364045966 @default.
• W2023353097 hasRelatedWork W2366815809 @default.
• W2023353097 hasRelatedWork W2392638099 @default.
• W2023353097 hasRelatedWork W2978310302 @default.
• W2023353097 hasRelatedWork W3187139661 @default.
• W2023353097 hasVolume "17" @default.
• W2023353097 isParatext "false" @default.
• W2023353097 isRetracted "false" @default.
• W2023353097 magId "2023353097" @default.

• next