Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023370179> ?p ?o ?g. }
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- W2023370179 endingPage "174" @default.
- W2023370179 startingPage "169" @default.
- W2023370179 abstract "GaAs oval defects arise from insufficient oxide surface passivation during chemical etching of the substrate. We have developed a new GaAs substrate preparation method which reduces the oval-defect density to less than 100 cm-2 and allows storage of prepared substrates in dust-free air for several weeks without any degradation. A modified configuration of selectively doped n-AlxGa1−xAs/ GaAs heterostructures with high-mobility 2DEG reduces the throughput time to < 30 min per wafer including epitaxial growth, wafer exchange, heat and cool times. Our growth rate of < 1 μm/h for GaAs allows growth of 500 high-quality heterostructure wafers for device fabrication without effusion-cell recharging." @default.
- W2023370179 created "2016-06-24" @default.
- W2023370179 creator A5036957357 @default.
- W2023370179 creator A5039188426 @default.
- W2023370179 creator A5075981624 @default.
- W2023370179 date "1987-02-01" @default.
- W2023370179 modified "2023-09-26" @default.
- W2023370179 title "Elimination of GaAs oval defects and high-throughput fabrication of selectively doped AlxGa1−xAs/GaAs heterostructures by MBE" @default.
- W2023370179 cites W1972061388 @default.
- W2023370179 cites W1978684317 @default.
- W2023370179 cites W1990400414 @default.
- W2023370179 cites W1996861478 @default.
- W2023370179 cites W2011135725 @default.
- W2023370179 cites W2040531045 @default.
- W2023370179 cites W2062278423 @default.
- W2023370179 cites W2065384770 @default.
- W2023370179 cites W2066462660 @default.
- W2023370179 cites W2077852114 @default.
- W2023370179 cites W2100782554 @default.
- W2023370179 doi "https://doi.org/10.1016/0022-0248(87)90386-1" @default.
- W2023370179 hasPublicationYear "1987" @default.
- W2023370179 type Work @default.
- W2023370179 sameAs 2023370179 @default.
- W2023370179 citedByCount "29" @default.
- W2023370179 crossrefType "journal-article" @default.
- W2023370179 hasAuthorship W2023370179A5036957357 @default.
- W2023370179 hasAuthorship W2023370179A5039188426 @default.
- W2023370179 hasAuthorship W2023370179A5075981624 @default.
- W2023370179 hasConcept C108225325 @default.
- W2023370179 hasConcept C119824511 @default.
- W2023370179 hasConcept C120665830 @default.
- W2023370179 hasConcept C121332964 @default.
- W2023370179 hasConcept C136525101 @default.
- W2023370179 hasConcept C142724271 @default.
- W2023370179 hasConcept C171250308 @default.
- W2023370179 hasConcept C192562407 @default.
- W2023370179 hasConcept C204787440 @default.
- W2023370179 hasConcept C2989315489 @default.
- W2023370179 hasConcept C49040817 @default.
- W2023370179 hasConcept C57863236 @default.
- W2023370179 hasConcept C62284982 @default.
- W2023370179 hasConcept C71924100 @default.
- W2023370179 hasConcept C79794668 @default.
- W2023370179 hasConceptScore W2023370179C108225325 @default.
- W2023370179 hasConceptScore W2023370179C119824511 @default.
- W2023370179 hasConceptScore W2023370179C120665830 @default.
- W2023370179 hasConceptScore W2023370179C121332964 @default.
- W2023370179 hasConceptScore W2023370179C136525101 @default.
- W2023370179 hasConceptScore W2023370179C142724271 @default.
- W2023370179 hasConceptScore W2023370179C171250308 @default.
- W2023370179 hasConceptScore W2023370179C192562407 @default.
- W2023370179 hasConceptScore W2023370179C204787440 @default.
- W2023370179 hasConceptScore W2023370179C2989315489 @default.
- W2023370179 hasConceptScore W2023370179C49040817 @default.
- W2023370179 hasConceptScore W2023370179C57863236 @default.
- W2023370179 hasConceptScore W2023370179C62284982 @default.
- W2023370179 hasConceptScore W2023370179C71924100 @default.
- W2023370179 hasConceptScore W2023370179C79794668 @default.
- W2023370179 hasIssue "1-4" @default.
- W2023370179 hasLocation W20233701791 @default.
- W2023370179 hasOpenAccess W2023370179 @default.
- W2023370179 hasPrimaryLocation W20233701791 @default.
- W2023370179 hasRelatedWork W1965325660 @default.
- W2023370179 hasRelatedWork W2002820943 @default.
- W2023370179 hasRelatedWork W2042524877 @default.
- W2023370179 hasRelatedWork W2058676402 @default.
- W2023370179 hasRelatedWork W2071401920 @default.
- W2023370179 hasRelatedWork W2093375454 @default.
- W2023370179 hasRelatedWork W2242834141 @default.
- W2023370179 hasRelatedWork W2745066641 @default.
- W2023370179 hasRelatedWork W4282569350 @default.
- W2023370179 hasRelatedWork W4284706829 @default.
- W2023370179 hasVolume "81" @default.
- W2023370179 isParatext "false" @default.
- W2023370179 isRetracted "false" @default.
- W2023370179 magId "2023370179" @default.
- W2023370179 workType "article" @default.