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- W2023371628 abstract "Pulsed lasers are used for sub micron scale fabrication. We employ adaptive optics for correction of focal depth induced aberrations and beam shaping. Adaptive multispot schemes are used for rapid parallel fabrication." @default.
- W2023371628 created "2016-06-24" @default.
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- W2023371628 date "2011-01-01" @default.
- W2023371628 modified "2023-09-23" @default.
- W2023371628 title "Laser microfabrication using adaptive optics: parallelization and aberration correction" @default.
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- W2023371628 doi "https://doi.org/10.1364/aopt.2011.amc5" @default.
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