Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023372577> ?p ?o ?g. }
Showing items 1 to 75 of
75
with 100 items per page.
- W2023372577 endingPage "1545" @default.
- W2023372577 startingPage "1540" @default.
- W2023372577 abstract "Analytical and Monte Carlo electron beam radial exposure distributions (REDs) are compared for accuracy in predicting proximity effects in submicron lithographic patterns. A proximity effect simulation tool (PRESTO) has been developed to convolve the desired pattern with the RED obtained from a companion Monte Carlo program for the simulation of electron energy loss (SEEL) or an empirical RED which is an analytical fit to experimental results. Together, SEEL and PRESTO are shown to simulate the electron beam exposure of submicron size patterns using a focused Gaussian electron beam system. PRESTO generates the electron distribution for the pattern by simulating the exposure of the resist for each pixel. Once the energy distribution has been determined equienergy density contours for the exposure of a given shape can be plotted. The ability of PRESTO and SEEL to accurately simulate the exposure of patterns with 0.25 μm design rules is demonstrated. Comparisons are made of the simulation results obtained when double Gaussian, triple Gaussian and SEEL approximations are used for the REDs. We also show that these two programs can be used to evaluate the sensitivity of the radial exposure distribution and proximity effects for multilevel substrates, for varying topography, and for different exposure conditions." @default.
- W2023372577 created "2016-06-24" @default.
- W2023372577 creator A5047159678 @default.
- W2023372577 creator A5072153887 @default.
- W2023372577 creator A5080054735 @default.
- W2023372577 date "1989-11-01" @default.
- W2023372577 modified "2023-09-27" @default.
- W2023372577 title "Simulation of electron beam exposure of submicron patterns" @default.
- W2023372577 doi "https://doi.org/10.1116/1.584529" @default.
- W2023372577 hasPublicationYear "1989" @default.
- W2023372577 type Work @default.
- W2023372577 sameAs 2023372577 @default.
- W2023372577 citedByCount "9" @default.
- W2023372577 countsByYear W20233725772016 @default.
- W2023372577 crossrefType "journal-article" @default.
- W2023372577 hasAuthorship W2023372577A5047159678 @default.
- W2023372577 hasAuthorship W2023372577A5072153887 @default.
- W2023372577 hasAuthorship W2023372577A5080054735 @default.
- W2023372577 hasConcept C105795698 @default.
- W2023372577 hasConcept C120665830 @default.
- W2023372577 hasConcept C121332964 @default.
- W2023372577 hasConcept C121864883 @default.
- W2023372577 hasConcept C147120987 @default.
- W2023372577 hasConcept C163716315 @default.
- W2023372577 hasConcept C168834538 @default.
- W2023372577 hasConcept C171250308 @default.
- W2023372577 hasConcept C185544564 @default.
- W2023372577 hasConcept C192562407 @default.
- W2023372577 hasConcept C19499675 @default.
- W2023372577 hasConcept C200274948 @default.
- W2023372577 hasConcept C2779227376 @default.
- W2023372577 hasConcept C30475298 @default.
- W2023372577 hasConcept C33923547 @default.
- W2023372577 hasConcept C53524968 @default.
- W2023372577 hasConcept C62520636 @default.
- W2023372577 hasConcept C95312477 @default.
- W2023372577 hasConceptScore W2023372577C105795698 @default.
- W2023372577 hasConceptScore W2023372577C120665830 @default.
- W2023372577 hasConceptScore W2023372577C121332964 @default.
- W2023372577 hasConceptScore W2023372577C121864883 @default.
- W2023372577 hasConceptScore W2023372577C147120987 @default.
- W2023372577 hasConceptScore W2023372577C163716315 @default.
- W2023372577 hasConceptScore W2023372577C168834538 @default.
- W2023372577 hasConceptScore W2023372577C171250308 @default.
- W2023372577 hasConceptScore W2023372577C185544564 @default.
- W2023372577 hasConceptScore W2023372577C192562407 @default.
- W2023372577 hasConceptScore W2023372577C19499675 @default.
- W2023372577 hasConceptScore W2023372577C200274948 @default.
- W2023372577 hasConceptScore W2023372577C2779227376 @default.
- W2023372577 hasConceptScore W2023372577C30475298 @default.
- W2023372577 hasConceptScore W2023372577C33923547 @default.
- W2023372577 hasConceptScore W2023372577C53524968 @default.
- W2023372577 hasConceptScore W2023372577C62520636 @default.
- W2023372577 hasConceptScore W2023372577C95312477 @default.
- W2023372577 hasIssue "6" @default.
- W2023372577 hasLocation W20233725771 @default.
- W2023372577 hasOpenAccess W2023372577 @default.
- W2023372577 hasPrimaryLocation W20233725771 @default.
- W2023372577 hasRelatedWork W1998372096 @default.
- W2023372577 hasRelatedWork W2009658857 @default.
- W2023372577 hasRelatedWork W2035092861 @default.
- W2023372577 hasRelatedWork W2070480731 @default.
- W2023372577 hasRelatedWork W2093136934 @default.
- W2023372577 hasRelatedWork W2117416144 @default.
- W2023372577 hasRelatedWork W2363150811 @default.
- W2023372577 hasRelatedWork W2557653631 @default.
- W2023372577 hasRelatedWork W4226323632 @default.
- W2023372577 hasRelatedWork W4321454142 @default.
- W2023372577 hasVolume "7" @default.
- W2023372577 isParatext "false" @default.
- W2023372577 isRetracted "false" @default.
- W2023372577 magId "2023372577" @default.
- W2023372577 workType "article" @default.