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- W2023375090 abstract "An electromagnetic field guiding device was implemented into an Ion Beam Sputtering (IBS) process. The EM-field causes higher deposition rates on the substrate. The efficiency of the guidance could be improved by optimization of the plasma conditions." @default.
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- W2023375090 date "2013-01-01" @default.
- W2023375090 modified "2023-10-10" @default.
- W2023375090 title "Influence of coating parameters on the efficiency in a modified IBS Process" @default.
- W2023375090 doi "https://doi.org/10.1364/oic.2013.thb.4" @default.
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