Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023388107> ?p ?o ?g. }
- W2023388107 abstract "Abstract An inductively coupled microplasma source operating under atmospheric pressure was fabricated as a vacuum ultraviolet (VUV) light source. The microplasma source consisted of a quartz capillary tube (OD: O1.5 mm, ID: O1 mm) surrounded by a coil antenna. A floating wire electrode was set inside the tube to induce a high electrical potential. Under He gas flow (0.5 slm), 100 MHz VHF power was supplied to the coil antenna. The microplasma source easily achieved plasma ignition under ambient conditions. To extract the VUV emissions from the microplasma, an optical system was designed. VUV emissions of N, O, and H were obtained from the microplasma source operated at 10 W of VHF power at 100 MHz. The inductively coupled microplasma source operating at atmospheric pressure was further miniaturized using MEMS technology with the goal of developing an easily transportable device. The size of the fabricated microplasma chip was 20 mm × 3 mm. The chip generated a point-like microplasma of O200 μm at a VHF power of 24 W. The point-like microplasma emitted clear spectral lines." @default.
- W2023388107 created "2016-06-24" @default.
- W2023388107 creator A5005900648 @default.
- W2023388107 creator A5006676797 @default.
- W2023388107 creator A5046409999 @default.
- W2023388107 creator A5047592840 @default.
- W2023388107 creator A5049780574 @default.
- W2023388107 creator A5082735601 @default.
- W2023388107 date "2014-08-01" @default.
- W2023388107 modified "2023-10-01" @default.
- W2023388107 title "An atmospheric pressure inductively coupled microplasma source of vacuum ultraviolet light" @default.
- W2023388107 cites W1634405436 @default.
- W2023388107 cites W1966687240 @default.
- W2023388107 cites W1973819505 @default.
- W2023388107 cites W1975526628 @default.
- W2023388107 cites W1983129258 @default.
- W2023388107 cites W1988322625 @default.
- W2023388107 cites W1993660429 @default.
- W2023388107 cites W2012262823 @default.
- W2023388107 cites W2012544985 @default.
- W2023388107 cites W2012941068 @default.
- W2023388107 cites W2020042553 @default.
- W2023388107 cites W2023899607 @default.
- W2023388107 cites W2030700419 @default.
- W2023388107 cites W2031337457 @default.
- W2023388107 cites W2033429025 @default.
- W2023388107 cites W2041013490 @default.
- W2023388107 cites W2066346187 @default.
- W2023388107 cites W2072342202 @default.
- W2023388107 cites W2084533979 @default.
- W2023388107 cites W2087244753 @default.
- W2023388107 cites W2090768230 @default.
- W2023388107 cites W2107902390 @default.
- W2023388107 cites W2117783334 @default.
- W2023388107 cites W2126803652 @default.
- W2023388107 cites W2152536583 @default.
- W2023388107 cites W3106391323 @default.
- W2023388107 cites W4241137167 @default.
- W2023388107 cites W4241780667 @default.
- W2023388107 cites W4248986925 @default.
- W2023388107 doi "https://doi.org/10.1016/j.sna.2013.09.018" @default.
- W2023388107 hasPublicationYear "2014" @default.
- W2023388107 type Work @default.
- W2023388107 sameAs 2023388107 @default.
- W2023388107 citedByCount "17" @default.
- W2023388107 countsByYear W20233881072014 @default.
- W2023388107 countsByYear W20233881072015 @default.
- W2023388107 countsByYear W20233881072016 @default.
- W2023388107 countsByYear W20233881072017 @default.
- W2023388107 countsByYear W20233881072018 @default.
- W2023388107 countsByYear W20233881072019 @default.
- W2023388107 countsByYear W20233881072020 @default.
- W2023388107 countsByYear W20233881072021 @default.
- W2023388107 crossrefType "journal-article" @default.
- W2023388107 hasAuthorship W2023388107A5005900648 @default.
- W2023388107 hasAuthorship W2023388107A5006676797 @default.
- W2023388107 hasAuthorship W2023388107A5046409999 @default.
- W2023388107 hasAuthorship W2023388107A5047592840 @default.
- W2023388107 hasAuthorship W2023388107A5049780574 @default.
- W2023388107 hasAuthorship W2023388107A5082735601 @default.
- W2023388107 hasConcept C113196181 @default.
- W2023388107 hasConcept C121332964 @default.
- W2023388107 hasConcept C153294291 @default.
- W2023388107 hasConcept C185592680 @default.
- W2023388107 hasConcept C192562407 @default.
- W2023388107 hasConcept C200239111 @default.
- W2023388107 hasConcept C43617362 @default.
- W2023388107 hasConcept C49040817 @default.
- W2023388107 hasConcept C62520636 @default.
- W2023388107 hasConcept C70420769 @default.
- W2023388107 hasConcept C82706917 @default.
- W2023388107 hasConcept C95974651 @default.
- W2023388107 hasConceptScore W2023388107C113196181 @default.
- W2023388107 hasConceptScore W2023388107C121332964 @default.
- W2023388107 hasConceptScore W2023388107C153294291 @default.
- W2023388107 hasConceptScore W2023388107C185592680 @default.
- W2023388107 hasConceptScore W2023388107C192562407 @default.
- W2023388107 hasConceptScore W2023388107C200239111 @default.
- W2023388107 hasConceptScore W2023388107C43617362 @default.
- W2023388107 hasConceptScore W2023388107C49040817 @default.
- W2023388107 hasConceptScore W2023388107C62520636 @default.
- W2023388107 hasConceptScore W2023388107C70420769 @default.
- W2023388107 hasConceptScore W2023388107C82706917 @default.
- W2023388107 hasConceptScore W2023388107C95974651 @default.
- W2023388107 hasLocation W20233881071 @default.
- W2023388107 hasOpenAccess W2023388107 @default.
- W2023388107 hasPrimaryLocation W20233881071 @default.
- W2023388107 hasRelatedWork W2022167378 @default.
- W2023388107 hasRelatedWork W2031337457 @default.
- W2023388107 hasRelatedWork W2062781802 @default.
- W2023388107 hasRelatedWork W2063646564 @default.
- W2023388107 hasRelatedWork W2069071652 @default.
- W2023388107 hasRelatedWork W2071281891 @default.
- W2023388107 hasRelatedWork W2150431638 @default.
- W2023388107 hasRelatedWork W2181704900 @default.
- W2023388107 hasRelatedWork W2200304506 @default.
- W2023388107 hasRelatedWork W2322089299 @default.
- W2023388107 hasRelatedWork W2402106058 @default.
- W2023388107 hasRelatedWork W2467274964 @default.
- W2023388107 hasRelatedWork W2553643453 @default.