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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023445062> ?p ?o ?g. }

• W2023445062 endingPage "168" @default.
• W2023445062 startingPage "161" @default.
• W2023445062 abstract "This paper deals with the performance of a palladium-gate MOS hydrogen sensor studied by conductance method. Structure of the device was fabricated on a n-type 〈100〉 silicon wafer having resistivity of 1–6 Ω cm using plasma technology. Sensitivity and response–recovery time of the fabricated sensor have been studied for different concentration (1480–11 840 ppm) of hydrogen with varying signal frequency (500 Hz, 10 and 100 kHz) at room temperature. Hydrogen-induced interface-trapped density (Nit) has been also evaluated as a function of gas concentration using a bias scan conductance method. Obtained results show that device performance is improved (i.e., high sensitivity and low response recovery time) and further it has been concluded that implementation of plasma technology (i.e., dry plasma cleaning of Si surface and in-situ RF anodization of Silicon in oxygen plasma near room temperature) may be a future step towards development of MOS-based sensors and integrated arrays with improved performance at room temperature." @default.
• W2023445062 created "2016-06-24" @default.
• W2023445062 creator A5069469512 @default.
• W2023445062 creator A5079331383 @default.
• W2023445062 creator A5079800856 @default.
• W2023445062 date "2000-12-01" @default.
• W2023445062 modified "2023-10-17" @default.
• W2023445062 title "Sensing properties of palladium-gate MOS (Pd-MOS) hydrogen sensor-based on plasma grown silicon dioxide" @default.
• W2023445062 cites W173690021 @default.
• W2023445062 cites W191766681 @default.
• W2023445062 cites W1966620821 @default.
• W2023445062 cites W1967489662 @default.
• W2023445062 cites W1972068649 @default.
• W2023445062 cites W1976084636 @default.
• W2023445062 cites W1976138617 @default.
• W2023445062 cites W1976454632 @default.
• W2023445062 cites W1989036133 @default.
• W2023445062 cites W1994645763 @default.
• W2023445062 cites W1999365201 @default.
• W2023445062 cites W2020738720 @default.
• W2023445062 cites W2033197362 @default.
• W2023445062 cites W2033950145 @default.
• W2023445062 cites W2049298430 @default.
• W2023445062 cites W2071735824 @default.
• W2023445062 cites W2072644553 @default.
• W2023445062 cites W2081886421 @default.
• W2023445062 cites W2093738730 @default.
• W2023445062 cites W2096795281 @default.
• W2023445062 cites W2142604078 @default.
• W2023445062 doi "https://doi.org/10.1016/s0925-4005(99)00069-6" @default.
• W2023445062 hasPublicationYear "2000" @default.
• W2023445062 type Work @default.
• W2023445062 sameAs 2023445062 @default.
• W2023445062 citedByCount "51" @default.
• W2023445062 countsByYear W20234450622012 @default.
• W2023445062 countsByYear W20234450622014 @default.
• W2023445062 countsByYear W20234450622015 @default.
• W2023445062 countsByYear W20234450622016 @default.
• W2023445062 countsByYear W20234450622017 @default.
• W2023445062 countsByYear W20234450622018 @default.
• W2023445062 countsByYear W20234450622019 @default.
• W2023445062 countsByYear W20234450622020 @default.
• W2023445062 countsByYear W20234450622021 @default.
• W2023445062 countsByYear W20234450622023 @default.
• W2023445062 crossrefType "journal-article" @default.
• W2023445062 hasAuthorship W2023445062A5069469512 @default.
• W2023445062 hasAuthorship W2023445062A5079331383 @default.
• W2023445062 hasAuthorship W2023445062A5079800856 @default.
• W2023445062 hasConcept C113196181 @default.
• W2023445062 hasConcept C114614502 @default.
• W2023445062 hasConcept C121332964 @default.
• W2023445062 hasConcept C121932024 @default.
• W2023445062 hasConcept C160671074 @default.
• W2023445062 hasConcept C161790260 @default.
• W2023445062 hasConcept C178790620 @default.
• W2023445062 hasConcept C185592680 @default.
• W2023445062 hasConcept C192562407 @default.
• W2023445062 hasConcept C30262120 @default.
• W2023445062 hasConcept C33923547 @default.
• W2023445062 hasConcept C43617362 @default.
• W2023445062 hasConcept C49040817 @default.
• W2023445062 hasConcept C502130503 @default.
• W2023445062 hasConcept C512968161 @default.
• W2023445062 hasConcept C544956773 @default.
• W2023445062 hasConcept C55493867 @default.
• W2023445062 hasConcept C62520636 @default.
• W2023445062 hasConcept C82706917 @default.
• W2023445062 hasConceptScore W2023445062C113196181 @default.
• W2023445062 hasConceptScore W2023445062C114614502 @default.
• W2023445062 hasConceptScore W2023445062C121332964 @default.
• W2023445062 hasConceptScore W2023445062C121932024 @default.
• W2023445062 hasConceptScore W2023445062C160671074 @default.
• W2023445062 hasConceptScore W2023445062C161790260 @default.
• W2023445062 hasConceptScore W2023445062C178790620 @default.
• W2023445062 hasConceptScore W2023445062C185592680 @default.
• W2023445062 hasConceptScore W2023445062C192562407 @default.
• W2023445062 hasConceptScore W2023445062C30262120 @default.
• W2023445062 hasConceptScore W2023445062C33923547 @default.
• W2023445062 hasConceptScore W2023445062C43617362 @default.
• W2023445062 hasConceptScore W2023445062C49040817 @default.
• W2023445062 hasConceptScore W2023445062C502130503 @default.
• W2023445062 hasConceptScore W2023445062C512968161 @default.
• W2023445062 hasConceptScore W2023445062C544956773 @default.
• W2023445062 hasConceptScore W2023445062C55493867 @default.
• W2023445062 hasConceptScore W2023445062C62520636 @default.
• W2023445062 hasConceptScore W2023445062C82706917 @default.
• W2023445062 hasIssue "3" @default.
• W2023445062 hasLocation W20234450621 @default.
• W2023445062 hasOpenAccess W2023445062 @default.
• W2023445062 hasPrimaryLocation W20234450621 @default.
• W2023445062 hasRelatedWork W1967931027 @default.
• W2023445062 hasRelatedWork W1977603461 @default.
• W2023445062 hasRelatedWork W1979962865 @default.
• W2023445062 hasRelatedWork W2042262001 @default.
• W2023445062 hasRelatedWork W2082349588 @default.
• W2023445062 hasRelatedWork W2126491228 @default.
• W2023445062 hasRelatedWork W2133953505 @default.
• W2023445062 hasRelatedWork W3009240264 @default.

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