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- W2023461941 endingPage "015010" @default.
- W2023461941 startingPage "015010" @default.
- W2023461941 abstract "A direct-write process device based on the atmospheric pressure air microplasma jet (AμPJ) has been developed for the localized etching of polymer films. The plasma was generated by the air discharge ejected out through a tip-nozzle (inner diameter of 100 μm), forming the microplasma jet. The AμPJ was capable of reacting with the polymer surface since it contains a high concentration of oxygen reactive species and thus resulted in the selective removal of polymer films. The experimental results demonstrated that the AμPJ could fabricate different microstructures on a parylene-C film without using any masks or causing any heat damage. The etch rate of parylene-C reached 5.1 μm min−1 and microstructures of different depth and width could also be realized by controlling two process parameters, namely, the etching time and the distance between the nozzle and the substrate. In addition, combining XPS analysis and oxygen-induced chemical etching principles, the potential etching mechanism of parylene-C by the AμPJ was investigated. Aside from the etching of parylene-C, micro-holes on the photoresist and polyimide film were successfully created by the AμPJ. In summary, maskless pattern etching of polymer films could be achieved using this AμPJ." @default.
- W2023461941 created "2016-06-24" @default.
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- W2023461941 date "2014-12-30" @default.
- W2023461941 modified "2023-09-27" @default.
- W2023461941 title "Localized etching of polymer films using an atmospheric pressure air microplasma jet" @default.
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- W2023461941 doi "https://doi.org/10.1088/0960-1317/25/1/015010" @default.
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