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- W2023474025 abstract "A novel and sensitive technique to measure the temperature of parallel-faced optical substrates is presented. The technique is based on the interference of a laser beam within the cavity formed by the flat faces of a substrate. Temperature-induced changes in the thickness and refractive index of the substrate alter the interference conditions, resulting in a large modulation of the reflected intensity of the laser beam. Advantages and disadvantages of this technique, calibration data, and potential applications are discussed." @default.
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- W2023474025 title "Noncontact, highly sensitive, optical substrate temperature measurement technique" @default.
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- W2023474025 doi "https://doi.org/10.1063/1.102865" @default.
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