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- W2023488960 abstract "As feature sizes get smaller the error of measurement must also become smaller. An adequate sub-micron measurement must be correct, within a certain or determined error limit. The error limit for a metrology instrument designed for use on sub-micron features in a production environment, the Opal 702, was investigated experimentally. There are numerous contributors to Iinewidth measurement uncertainty; (1) Dynamic Precision (including wafer and system variations), (2) system Stability (determined in a way to avoid including wafer stability), and (3) Offset (dependent on signal interpretation or algorithm) [1]. In a practical way all these variables are incorporated in (4) Dynamic Uncertainty.© (1990) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only." @default.
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- W2023488960 title "<title>Certain linewidth measurements</title>" @default.
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