FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023557552> ?p ?o ?g. }

• W2023557552 abstract "We manufactured for the first time MIS capacitors based on aluminium nitride (AlN) thin films synthesized by Pulsed Laser Deposition (PLD). AlN films were deposited on Si substrates by PLD from AlN targets in nitrogen ambient by multi-pulse ablation using a UV KrF excimer laser source (λ = 248 nm, τ = 7 ns). The structures we prepared were electrically characterized by C-V and I-V complementary measurements. Our studies evidence the formation of good interfaces, and of defects into the film bulk which are electrically active. This justifies further developments in view of future applications of PLD synthesized AlN thin films as a dielectric alternatives to SiO 2 ." @default.
• W2023557552 created "2016-06-24" @default.
• W2023557552 creator A5008552589 @default.
• W2023557552 creator A5009806110 @default.
• W2023557552 creator A5035594445 @default.
• W2023557552 creator A5054108457 @default.
• W2023557552 creator A5061081703 @default.
• W2023557552 creator A5076707230 @default.
• W2023557552 creator A5077642410 @default.
• W2023557552 creator A5077826117 @default.
• W2023557552 date "2006-02-17" @default.
• W2023557552 modified "2023-10-17" @default.
• W2023557552 title "Electrical Properties of MIS Capacitors with AlN Films Synthesized by Pulsed Laser Deposition" @default.
• W2023557552 cites W1652972897 @default.
• W2023557552 cites W1979594289 @default.
• W2023557552 cites W1992789451 @default.
• W2023557552 cites W2001102314 @default.
• W2023557552 cites W2010029662 @default.
• W2023557552 cites W2032756583 @default.
• W2023557552 cites W2039326841 @default.
• W2023557552 cites W2047723912 @default.
• W2023557552 cites W2074143600 @default.
• W2023557552 cites W2081421703 @default.
• W2023557552 cites W2093359430 @default.
• W2023557552 cites W4232274858 @default.
• W2023557552 doi "https://doi.org/10.1002/ppap.200500123" @default.
• W2023557552 hasPublicationYear "2006" @default.
• W2023557552 type Work @default.
• W2023557552 sameAs 2023557552 @default.
• W2023557552 citedByCount "5" @default.
• W2023557552 countsByYear W20235575522014 @default.
• W2023557552 crossrefType "journal-article" @default.
• W2023557552 hasAuthorship W2023557552A5008552589 @default.
• W2023557552 hasAuthorship W2023557552A5009806110 @default.
• W2023557552 hasAuthorship W2023557552A5035594445 @default.
• W2023557552 hasAuthorship W2023557552A5054108457 @default.
• W2023557552 hasAuthorship W2023557552A5061081703 @default.
• W2023557552 hasAuthorship W2023557552A5076707230 @default.
• W2023557552 hasAuthorship W2023557552A5077642410 @default.
• W2023557552 hasAuthorship W2023557552A5077826117 @default.
• W2023557552 hasConcept C119599485 @default.
• W2023557552 hasConcept C120665830 @default.
• W2023557552 hasConcept C121332964 @default.
• W2023557552 hasConcept C127413603 @default.
• W2023557552 hasConcept C133386390 @default.
• W2023557552 hasConcept C151730666 @default.
• W2023557552 hasConcept C159985019 @default.
• W2023557552 hasConcept C165801399 @default.
• W2023557552 hasConcept C171250308 @default.
• W2023557552 hasConcept C19067145 @default.
• W2023557552 hasConcept C192562407 @default.
• W2023557552 hasConcept C194760766 @default.
• W2023557552 hasConcept C2779188808 @default.
• W2023557552 hasConcept C2779227376 @default.
• W2023557552 hasConcept C2780162792 @default.
• W2023557552 hasConcept C2780477314 @default.
• W2023557552 hasConcept C2816523 @default.
• W2023557552 hasConcept C37982897 @default.
• W2023557552 hasConcept C49040817 @default.
• W2023557552 hasConcept C513153333 @default.
• W2023557552 hasConcept C520434653 @default.
• W2023557552 hasConcept C52192207 @default.
• W2023557552 hasConcept C64297162 @default.
• W2023557552 hasConcept C86803240 @default.
• W2023557552 hasConceptScore W2023557552C119599485 @default.
• W2023557552 hasConceptScore W2023557552C120665830 @default.
• W2023557552 hasConceptScore W2023557552C121332964 @default.
• W2023557552 hasConceptScore W2023557552C127413603 @default.
• W2023557552 hasConceptScore W2023557552C133386390 @default.
• W2023557552 hasConceptScore W2023557552C151730666 @default.
• W2023557552 hasConceptScore W2023557552C159985019 @default.
• W2023557552 hasConceptScore W2023557552C165801399 @default.
• W2023557552 hasConceptScore W2023557552C171250308 @default.
• W2023557552 hasConceptScore W2023557552C19067145 @default.
• W2023557552 hasConceptScore W2023557552C192562407 @default.
• W2023557552 hasConceptScore W2023557552C194760766 @default.
• W2023557552 hasConceptScore W2023557552C2779188808 @default.
• W2023557552 hasConceptScore W2023557552C2779227376 @default.
• W2023557552 hasConceptScore W2023557552C2780162792 @default.
• W2023557552 hasConceptScore W2023557552C2780477314 @default.
• W2023557552 hasConceptScore W2023557552C2816523 @default.
• W2023557552 hasConceptScore W2023557552C37982897 @default.
• W2023557552 hasConceptScore W2023557552C49040817 @default.
• W2023557552 hasConceptScore W2023557552C513153333 @default.
• W2023557552 hasConceptScore W2023557552C520434653 @default.
• W2023557552 hasConceptScore W2023557552C52192207 @default.
• W2023557552 hasConceptScore W2023557552C64297162 @default.
• W2023557552 hasConceptScore W2023557552C86803240 @default.
• W2023557552 hasLocation W20235575521 @default.
• W2023557552 hasOpenAccess W2023557552 @default.
• W2023557552 hasPrimaryLocation W20235575521 @default.
• W2023557552 hasRelatedWork W2003159812 @default.
• W2023557552 hasRelatedWork W2062560476 @default.
• W2023557552 hasRelatedWork W2136418796 @default.
• W2023557552 hasRelatedWork W2163999407 @default.
• W2023557552 hasRelatedWork W2318739715 @default.
• W2023557552 hasRelatedWork W2352746946 @default.
• W2023557552 hasRelatedWork W2354654386 @default.
• W2023557552 hasRelatedWork W2368211752 @default.
• W2023557552 hasRelatedWork W2514979867 @default.

• next