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- W2023588273 abstract "Application of silicon dry etching for the fabrication of low-pressure sensors, acceleration sensors and silicon cantilevers with integrated deflection sensors for atomic force microscopy is presented. 3D devices, with various configurations, have been fabricated simultaneously on the same silicon wafer. Reactive Ion Etching with magnetically confined SF6/Ar/CCl2F2 plasma with a photoresist mask layer allows to combine formation of stepped membranes, bridges and cantilevers with the final stage of the standard CMOS process." @default.
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- W2023588273 date "1994-01-01" @default.
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- W2023588273 title "Plasma etching for micromechanical sensor applications" @default.
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- W2023588273 doi "https://doi.org/10.1016/0167-9317(94)90174-0" @default.
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