FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023591734> ?p ?o ?g. }

• W2023591734 endingPage "1867" @default.
• W2023591734 startingPage "1858" @default.
• W2023591734 abstract "This article reports a novel crosslinking functionality of the 2-hydroxyethyl methacrylate unit (HEMA) in the presence of an acid. The polymeric compositions, consisting of a polymer containing the HEMA unit and a photoacid generator, were insolubilized in an aqueous base developer on exposure to UV light and a successive baking process to provide a negative-working photoresist. A series of poly(benzyl methacrylate-co-methacrylic acid-co-2-hydroxyethyl methacrylate) terpolymers with various contents of HEMA were prepared to elucidate the photopolymeric characteristics. The polymer behavior in films was examined by a comparison of the photosensitivity and IR spectroscopic method. Experiments with a model compound were also carried out. On the basis of the results, we found that the resist was insolubilized by crosslinking through the transesterification of HEMA segments due to acid generated from the photoacid generator and subsequent heating. The advantage of using the 2-hydroxyethyl group is that in the terpolymer, the HEMA unit is transparent at a short-wavelength region and is a promising crosslinking unit for ArF lithographic photoresists. © 2002 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 40: 1858–1867, 2002" @default.
• W2023591734 created "2016-06-24" @default.
• W2023591734 creator A5003052181 @default.
• W2023591734 creator A5024610841 @default.
• W2023591734 creator A5051485127 @default.
• W2023591734 creator A5063662650 @default.
• W2023591734 creator A5066459722 @default.
• W2023591734 creator A5083586208 @default.
• W2023591734 date "2002-04-23" @default.
• W2023591734 modified "2023-10-18" @default.
• W2023591734 title "Negative-working photoresist of methacrylate polymers based on the transesterification of the 2-hydroxyethyl group in the presence of an acid" @default.
• W2023591734 cites W1966201431 @default.
• W2023591734 cites W1967484955 @default.
• W2023591734 cites W1973989926 @default.
• W2023591734 cites W1993130241 @default.
• W2023591734 cites W1994387623 @default.
• W2023591734 cites W2004108775 @default.
• W2023591734 cites W2012914461 @default.
• W2023591734 cites W2015911412 @default.
• W2023591734 cites W2019893130 @default.
• W2023591734 cites W2031634052 @default.
• W2023591734 cites W2034828133 @default.
• W2023591734 cites W2061180543 @default.
• W2023591734 cites W2065282999 @default.
• W2023591734 cites W2079482590 @default.
• W2023591734 cites W2079923984 @default.
• W2023591734 cites W2086192604 @default.
• W2023591734 cites W2094293154 @default.
• W2023591734 cites W2130739983 @default.
• W2023591734 cites W2130906289 @default.
• W2023591734 cites W2151703212 @default.
• W2023591734 cites W2172253633 @default.
• W2023591734 cites W2085512094 @default.
• W2023591734 doi "https://doi.org/10.1002/pola.10252" @default.
• W2023591734 hasPublicationYear "2002" @default.
• W2023591734 type Work @default.
• W2023591734 sameAs 2023591734 @default.
• W2023591734 citedByCount "23" @default.
• W2023591734 countsByYear W20235917342012 @default.
• W2023591734 countsByYear W20235917342013 @default.
• W2023591734 countsByYear W20235917342014 @default.
• W2023591734 countsByYear W20235917342018 @default.
• W2023591734 countsByYear W20235917342020 @default.
• W2023591734 countsByYear W20235917342021 @default.
• W2023591734 countsByYear W20235917342022 @default.
• W2023591734 crossrefType "journal-article" @default.
• W2023591734 hasAuthorship W2023591734A5003052181 @default.
• W2023591734 hasAuthorship W2023591734A5024610841 @default.
• W2023591734 hasAuthorship W2023591734A5051485127 @default.
• W2023591734 hasAuthorship W2023591734A5063662650 @default.
• W2023591734 hasAuthorship W2023591734A5066459722 @default.
• W2023591734 hasAuthorship W2023591734A5083586208 @default.
• W2023591734 hasConcept C132050475 @default.
• W2023591734 hasConcept C134406635 @default.
• W2023591734 hasConcept C15920480 @default.
• W2023591734 hasConcept C159985019 @default.
• W2023591734 hasConcept C161790260 @default.
• W2023591734 hasConcept C178790620 @default.
• W2023591734 hasConcept C184651966 @default.
• W2023591734 hasConcept C185592680 @default.
• W2023591734 hasConcept C188027245 @default.
• W2023591734 hasConcept C192562407 @default.
• W2023591734 hasConcept C2775968528 @default.
• W2023591734 hasConcept C2777241282 @default.
• W2023591734 hasConcept C2778140322 @default.
• W2023591734 hasConcept C2779227376 @default.
• W2023591734 hasConcept C2910255311 @default.
• W2023591734 hasConcept C521977710 @default.
• W2023591734 hasConceptScore W2023591734C132050475 @default.
• W2023591734 hasConceptScore W2023591734C134406635 @default.
• W2023591734 hasConceptScore W2023591734C15920480 @default.
• W2023591734 hasConceptScore W2023591734C159985019 @default.
• W2023591734 hasConceptScore W2023591734C161790260 @default.
• W2023591734 hasConceptScore W2023591734C178790620 @default.
• W2023591734 hasConceptScore W2023591734C184651966 @default.
• W2023591734 hasConceptScore W2023591734C185592680 @default.
• W2023591734 hasConceptScore W2023591734C188027245 @default.
• W2023591734 hasConceptScore W2023591734C192562407 @default.
• W2023591734 hasConceptScore W2023591734C2775968528 @default.
• W2023591734 hasConceptScore W2023591734C2777241282 @default.
• W2023591734 hasConceptScore W2023591734C2778140322 @default.
• W2023591734 hasConceptScore W2023591734C2779227376 @default.
• W2023591734 hasConceptScore W2023591734C2910255311 @default.
• W2023591734 hasConceptScore W2023591734C521977710 @default.
• W2023591734 hasIssue "11" @default.
• W2023591734 hasLocation W20235917341 @default.
• W2023591734 hasOpenAccess W2023591734 @default.
• W2023591734 hasPrimaryLocation W20235917341 @default.
• W2023591734 hasRelatedWork W1533289191 @default.
• W2023591734 hasRelatedWork W1970975679 @default.
• W2023591734 hasRelatedWork W1985547450 @default.
• W2023591734 hasRelatedWork W2021634762 @default.
• W2023591734 hasRelatedWork W2056458539 @default.
• W2023591734 hasRelatedWork W2166424186 @default.
• W2023591734 hasRelatedWork W2201111489 @default.
• W2023591734 hasRelatedWork W2367431146 @default.
• W2023591734 hasRelatedWork W2374262867 @default.
• W2023591734 hasRelatedWork W808191209 @default.

• next