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- W2023606985 abstract "In this work we report a novel method of fabricating low loss coplanar waveguides (CPW) on CMOS grade low resistivity silicon (2Ω-cm) substrates using a micro-machined SU8 negative resist as a dielectric interface layer. S parameter measurements up 110 GHz and electromagnetic analysis was used to determine the performance of the CPW on the SU8 dielectric interface layer. An attenuation of less than 0.6 dB/mm at 60 GHz was achieved." @default.
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- W2023606985 date "2003-06-01" @default.
- W2023606985 modified "2023-09-27" @default.
- W2023606985 title "Micromachined SU8 negative resist for MMIC applications on low resistivity CMOS substrates" @default.
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- W2023606985 doi "https://doi.org/10.1016/s0167-9317(03)00188-6" @default.
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