Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023622582> ?p ?o ?g. }
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- W2023622582 endingPage "185302" @default.
- W2023622582 startingPage "185302" @default.
- W2023622582 abstract "A novel method for fabricating nanoimprint lithography (NIL) molds for T-shaped gates (T-gates) for high speed transistors is proposed and demonstrated. This method uses NIL, low pressure chemical vapor deposition and reactive ion etching processes, and avoids costly electron beam lithography and high accuracy alignment technology. Using the T-gate nanoimprint molds fabricated by this novel method, T-gates with a footprint as small as sub-16 nm were achieved. This method can be extended to fabricate a broad range of 3D nanostructures." @default.
- W2023622582 created "2016-06-24" @default.
- W2023622582 creator A5041595489 @default.
- W2023622582 creator A5045876611 @default.
- W2023622582 creator A5048506123 @default.
- W2023622582 date "2009-04-14" @default.
- W2023622582 modified "2023-09-28" @default.
- W2023622582 title "A novel method for fabricating sub-16 nm footprint T-gate nanoimprint molds" @default.
- W2023622582 cites W1969651049 @default.
- W2023622582 cites W1970252689 @default.
- W2023622582 cites W1989267639 @default.
- W2023622582 cites W1999376893 @default.
- W2023622582 cites W2001621338 @default.
- W2023622582 cites W2101604814 @default.
- W2023622582 doi "https://doi.org/10.1088/0957-4484/20/18/185302" @default.
- W2023622582 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/19420609" @default.
- W2023622582 hasPublicationYear "2009" @default.
- W2023622582 type Work @default.
- W2023622582 sameAs 2023622582 @default.
- W2023622582 citedByCount "10" @default.
- W2023622582 countsByYear W20236225822012 @default.
- W2023622582 countsByYear W20236225822014 @default.
- W2023622582 countsByYear W20236225822015 @default.
- W2023622582 countsByYear W20236225822017 @default.
- W2023622582 countsByYear W20236225822019 @default.
- W2023622582 countsByYear W20236225822021 @default.
- W2023622582 crossrefType "journal-article" @default.
- W2023622582 hasAuthorship W2023622582A5041595489 @default.
- W2023622582 hasAuthorship W2023622582A5045876611 @default.
- W2023622582 hasAuthorship W2023622582A5048506123 @default.
- W2023622582 hasConcept C100460472 @default.
- W2023622582 hasConcept C119599485 @default.
- W2023622582 hasConcept C127413603 @default.
- W2023622582 hasConcept C130472188 @default.
- W2023622582 hasConcept C132943942 @default.
- W2023622582 hasConcept C136525101 @default.
- W2023622582 hasConcept C142724271 @default.
- W2023622582 hasConcept C151730666 @default.
- W2023622582 hasConcept C165801399 @default.
- W2023622582 hasConcept C171250308 @default.
- W2023622582 hasConcept C172385210 @default.
- W2023622582 hasConcept C192562407 @default.
- W2023622582 hasConcept C200274948 @default.
- W2023622582 hasConcept C204223013 @default.
- W2023622582 hasConcept C204787440 @default.
- W2023622582 hasConcept C2777046567 @default.
- W2023622582 hasConcept C2779227376 @default.
- W2023622582 hasConcept C49040817 @default.
- W2023622582 hasConcept C53524968 @default.
- W2023622582 hasConcept C57410435 @default.
- W2023622582 hasConcept C71924100 @default.
- W2023622582 hasConcept C86803240 @default.
- W2023622582 hasConceptScore W2023622582C100460472 @default.
- W2023622582 hasConceptScore W2023622582C119599485 @default.
- W2023622582 hasConceptScore W2023622582C127413603 @default.
- W2023622582 hasConceptScore W2023622582C130472188 @default.
- W2023622582 hasConceptScore W2023622582C132943942 @default.
- W2023622582 hasConceptScore W2023622582C136525101 @default.
- W2023622582 hasConceptScore W2023622582C142724271 @default.
- W2023622582 hasConceptScore W2023622582C151730666 @default.
- W2023622582 hasConceptScore W2023622582C165801399 @default.
- W2023622582 hasConceptScore W2023622582C171250308 @default.
- W2023622582 hasConceptScore W2023622582C172385210 @default.
- W2023622582 hasConceptScore W2023622582C192562407 @default.
- W2023622582 hasConceptScore W2023622582C200274948 @default.
- W2023622582 hasConceptScore W2023622582C204223013 @default.
- W2023622582 hasConceptScore W2023622582C204787440 @default.
- W2023622582 hasConceptScore W2023622582C2777046567 @default.
- W2023622582 hasConceptScore W2023622582C2779227376 @default.
- W2023622582 hasConceptScore W2023622582C49040817 @default.
- W2023622582 hasConceptScore W2023622582C53524968 @default.
- W2023622582 hasConceptScore W2023622582C57410435 @default.
- W2023622582 hasConceptScore W2023622582C71924100 @default.
- W2023622582 hasConceptScore W2023622582C86803240 @default.
- W2023622582 hasIssue "18" @default.
- W2023622582 hasLocation W20236225821 @default.
- W2023622582 hasLocation W20236225822 @default.
- W2023622582 hasOpenAccess W2023622582 @default.
- W2023622582 hasPrimaryLocation W20236225821 @default.
- W2023622582 hasRelatedWork W1988594448 @default.
- W2023622582 hasRelatedWork W2010460993 @default.
- W2023622582 hasRelatedWork W2014141463 @default.
- W2023622582 hasRelatedWork W2036308644 @default.
- W2023622582 hasRelatedWork W2055632094 @default.
- W2023622582 hasRelatedWork W2064179573 @default.
- W2023622582 hasRelatedWork W2065431068 @default.
- W2023622582 hasRelatedWork W2067116090 @default.
- W2023622582 hasRelatedWork W2792297505 @default.
- W2023622582 hasRelatedWork W2906528141 @default.
- W2023622582 hasVolume "20" @default.
- W2023622582 isParatext "false" @default.
- W2023622582 isRetracted "false" @default.
- W2023622582 magId "2023622582" @default.
- W2023622582 workType "article" @default.