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- W2023641578 abstract "A SOG/etch-back process has been developed in order to be compatible with a 0.5 micrometers triple level metal technology with plugged vias. Four SOG are compared in terms of planarization level after coating but also after etch-back. The etching process is studied in order to reach the low selectivities required to compensate the microloading effects of patterned wafers. The compromise between high planarization level and low surface roughness is obtained by adjusting selectivity and etching time. Planarization level and complete SOG consumption, required to avoid vias poisoning, can be controlled by measuring TEOS1 consumption after etch-back. Vias and metal yield are measured on different topographies. Results illustrate the planarization efficiency." @default.
- W2023641578 created "2016-06-24" @default.
- W2023641578 creator A5008299587 @default.
- W2023641578 creator A5038343912 @default.
- W2023641578 creator A5058018071 @default.
- W2023641578 creator A5070404431 @default.
- W2023641578 creator A5083402694 @default.
- W2023641578 date "1993-09-15" @default.
- W2023641578 modified "2023-09-23" @default.
- W2023641578 title "Spin on glass (SOG) etch-back planarization process: an industrial solution for 0.5-μm CMOS TLM technology" @default.
- W2023641578 doi "https://doi.org/10.1117/12.156515" @default.
- W2023641578 hasPublicationYear "1993" @default.
- W2023641578 type Work @default.
- W2023641578 sameAs 2023641578 @default.
- W2023641578 citedByCount "0" @default.
- W2023641578 crossrefType "proceedings-article" @default.
- W2023641578 hasAuthorship W2023641578A5008299587 @default.
- W2023641578 hasAuthorship W2023641578A5038343912 @default.
- W2023641578 hasAuthorship W2023641578A5058018071 @default.
- W2023641578 hasAuthorship W2023641578A5070404431 @default.
- W2023641578 hasAuthorship W2023641578A5083402694 @default.
- W2023641578 hasConcept C100460472 @default.
- W2023641578 hasConcept C107365816 @default.
- W2023641578 hasConcept C1291036 @default.
- W2023641578 hasConcept C138113353 @default.
- W2023641578 hasConcept C159985019 @default.
- W2023641578 hasConcept C160671074 @default.
- W2023641578 hasConcept C171250308 @default.
- W2023641578 hasConcept C180088628 @default.
- W2023641578 hasConcept C192562407 @default.
- W2023641578 hasConcept C2779227376 @default.
- W2023641578 hasConcept C46362747 @default.
- W2023641578 hasConcept C49040817 @default.
- W2023641578 hasConceptScore W2023641578C100460472 @default.
- W2023641578 hasConceptScore W2023641578C107365816 @default.
- W2023641578 hasConceptScore W2023641578C1291036 @default.
- W2023641578 hasConceptScore W2023641578C138113353 @default.
- W2023641578 hasConceptScore W2023641578C159985019 @default.
- W2023641578 hasConceptScore W2023641578C160671074 @default.
- W2023641578 hasConceptScore W2023641578C171250308 @default.
- W2023641578 hasConceptScore W2023641578C180088628 @default.
- W2023641578 hasConceptScore W2023641578C192562407 @default.
- W2023641578 hasConceptScore W2023641578C2779227376 @default.
- W2023641578 hasConceptScore W2023641578C46362747 @default.
- W2023641578 hasConceptScore W2023641578C49040817 @default.
- W2023641578 hasLocation W20236415781 @default.
- W2023641578 hasOpenAccess W2023641578 @default.
- W2023641578 hasPrimaryLocation W20236415781 @default.
- W2023641578 hasRelatedWork W2014225583 @default.
- W2023641578 hasRelatedWork W2065484933 @default.
- W2023641578 hasRelatedWork W2143216866 @default.
- W2023641578 hasRelatedWork W2365055564 @default.
- W2023641578 hasRelatedWork W2366216218 @default.
- W2023641578 hasRelatedWork W2384183777 @default.
- W2023641578 hasRelatedWork W2657382776 @default.
- W2023641578 hasRelatedWork W429018439 @default.
- W2023641578 hasRelatedWork W4307861420 @default.
- W2023641578 hasRelatedWork W749211866 @default.
- W2023641578 isParatext "false" @default.
- W2023641578 isRetracted "false" @default.
- W2023641578 magId "2023641578" @default.
- W2023641578 workType "article" @default.