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- W2023643031 abstract "We discuss the deposition of silicon oxides and nitrides by remote plasma enhanced chemical vapor deposition (RPECVD). We identify a new dielectric, silicon diimide, and indicate the conditions for its growth. We discuss applicatiins of these films in device structures." @default.
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- W2023643031 date "1985-12-01" @default.
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- W2023643031 title "Low temperature deposition of amorphous silicon oxide and silicon nitride films" @default.
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- W2023643031 doi "https://doi.org/10.1016/0022-3093(85)90812-9" @default.
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