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- W2023643382 abstract "Single- and multiple-energy Be+/P+, Be+/Ar+, and Be+/N+ coimplantations were performed into semi-insulating InP:Fe. Significantly higher Be dopant activations were obtained for Be+/P+ and Be+/Ar+ coimplantations compared to Be+ implantation. Sharp hole-concentration depth profiles were obtained for Be+/P+ and Be+/Ar+ coimplantations in contrast to the deep diffusion fronts for Be+ implantation. A high degree of crystalline lattice damage in coimplanted material is believed to be responsible for the improved electrical characteristics of the material. A poor Be dopant electrical activation was observed for Be+/N+ coimplantation." @default.
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- W2023643382 date "1990-02-15" @default.
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- W2023643382 title "Be+/P+, Be+/Ar+, and Be+/N+ coimplantations into InP:Fe" @default.
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