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- W2023647526 abstract "We present the results of an experimental and theoretical investigation of the initial oxidation of Si(100). Oxidation kinetics were measured in real time by x-ray-photoelectron spectroscopy. In the pressure and temperature regime studied, we observed the following kinetic phenomena: a decrease of the initial oxidation rate with increasing temperature, kinetic curves (i.e., coverage vs time) showing saturation with the saturation value increase for the higher temperatures, and a transition from ``passive'' to ``active'' oxidation. To account for the experimental results a phenomenological first-order phase-transition theory was used. On comparing the experimental and theoretical results, we suggested a physical mechanism for submonolayer silicon oxide formation." @default.
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- W2023647526 date "1994-02-15" @default.
- W2023647526 modified "2023-09-27" @default.
- W2023647526 title "Mechanism of submonolayer oxide formation on silicon surfaces upon thermal oxidation" @default.
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- W2023647526 doi "https://doi.org/10.1103/physrevb.49.5415" @default.
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