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- W2023652589 abstract "The detailed knowledge of thermal expansion and dimensional stability of low expansion materials is of growing interest and requires measurements of length changes with sub nm uncertainty. In addition to accurately defined environmental conditions the interferometer adjustment, namely the number of fringes covering the sample and also the method of autocollimation adjustment, become more important. Their influence, investigated with PTB's precision interferometer, will be discussed." @default.
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- W2023652589 date "2003-11-21" @default.
- W2023652589 modified "2023-09-23" @default.
- W2023652589 title "Minimizing interferometer misalignment errors for measurement of subnanometer length changes" @default.
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- W2023652589 doi "https://doi.org/10.1117/12.503677" @default.
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