Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023667478> ?p ?o ?g. }
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- W2023667478 endingPage "4373" @default.
- W2023667478 startingPage "4373" @default.
- W2023667478 abstract "The application of vibrational/rotational energy to material gas ( SiH 4 ) and radicals by heating the material gas has been investigated in order to improve the properties of hydrogenated amorphous silicon (a-Si:H) for solar cells. It has been found that the optical gap ( E opt ) of a-Si:H films deposited from heated SiH 4 (temperature of the gas heater: 280–380° C) is narrower by about 20–30 meV than those of conventional films where SiH 4 is not heated, using the same substrate temperature ( T s ) and deposition rate ( R d ). This result suggests that the heated SiH 4 molecules or related radicals promote reactions at or near the film-growing surface. In other words, applying vibrational, rotational, or translational energy to SiH 4 gas has the same effect as raising T s in plasma chemical vapor deposition (plasma-CVD) of a-Si:H. It is demonstrated that gas heating can improve the conversion efficiency of a-Si solar cells by reducing the damage to underlying layers during i-layer deposition." @default.
- W2023667478 created "2016-06-24" @default.
- W2023667478 creator A5051463330 @default.
- W2023667478 creator A5071143581 @default.
- W2023667478 creator A5086472373 @default.
- W2023667478 creator A5090852742 @default.
- W2023667478 date "1994-07-01" @default.
- W2023667478 modified "2023-10-17" @default.
- W2023667478 title "Effect of Heating SiH<sub>4</sub> on the Plasma Chemical Vapor Deposition of Hydrogenated Amorphous Silicon" @default.
- W2023667478 cites W1966985939 @default.
- W2023667478 cites W2004141856 @default.
- W2023667478 cites W2007826678 @default.
- W2023667478 cites W2016565334 @default.
- W2023667478 cites W2076126600 @default.
- W2023667478 cites W2083470419 @default.
- W2023667478 cites W2094264215 @default.
- W2023667478 cites W2141232241 @default.
- W2023667478 doi "https://doi.org/10.1143/jjap.33.4373" @default.
- W2023667478 hasPublicationYear "1994" @default.
- W2023667478 type Work @default.
- W2023667478 sameAs 2023667478 @default.
- W2023667478 citedByCount "7" @default.
- W2023667478 countsByYear W20236674782016 @default.
- W2023667478 countsByYear W20236674782020 @default.
- W2023667478 crossrefType "journal-article" @default.
- W2023667478 hasAuthorship W2023667478A5051463330 @default.
- W2023667478 hasAuthorship W2023667478A5071143581 @default.
- W2023667478 hasAuthorship W2023667478A5086472373 @default.
- W2023667478 hasAuthorship W2023667478A5090852742 @default.
- W2023667478 hasConcept C111368507 @default.
- W2023667478 hasConcept C113196181 @default.
- W2023667478 hasConcept C121332964 @default.
- W2023667478 hasConcept C127313418 @default.
- W2023667478 hasConcept C139066938 @default.
- W2023667478 hasConcept C151730666 @default.
- W2023667478 hasConcept C171250308 @default.
- W2023667478 hasConcept C178790620 @default.
- W2023667478 hasConcept C185592680 @default.
- W2023667478 hasConcept C192562407 @default.
- W2023667478 hasConcept C2776390347 @default.
- W2023667478 hasConcept C2777289219 @default.
- W2023667478 hasConcept C2779227376 @default.
- W2023667478 hasConcept C2779667780 @default.
- W2023667478 hasConcept C2816523 @default.
- W2023667478 hasConcept C38347018 @default.
- W2023667478 hasConcept C49040817 @default.
- W2023667478 hasConcept C544956773 @default.
- W2023667478 hasConcept C56052488 @default.
- W2023667478 hasConcept C57410435 @default.
- W2023667478 hasConcept C62520636 @default.
- W2023667478 hasConcept C64297162 @default.
- W2023667478 hasConcept C82706917 @default.
- W2023667478 hasConcept C86803240 @default.
- W2023667478 hasConceptScore W2023667478C111368507 @default.
- W2023667478 hasConceptScore W2023667478C113196181 @default.
- W2023667478 hasConceptScore W2023667478C121332964 @default.
- W2023667478 hasConceptScore W2023667478C127313418 @default.
- W2023667478 hasConceptScore W2023667478C139066938 @default.
- W2023667478 hasConceptScore W2023667478C151730666 @default.
- W2023667478 hasConceptScore W2023667478C171250308 @default.
- W2023667478 hasConceptScore W2023667478C178790620 @default.
- W2023667478 hasConceptScore W2023667478C185592680 @default.
- W2023667478 hasConceptScore W2023667478C192562407 @default.
- W2023667478 hasConceptScore W2023667478C2776390347 @default.
- W2023667478 hasConceptScore W2023667478C2777289219 @default.
- W2023667478 hasConceptScore W2023667478C2779227376 @default.
- W2023667478 hasConceptScore W2023667478C2779667780 @default.
- W2023667478 hasConceptScore W2023667478C2816523 @default.
- W2023667478 hasConceptScore W2023667478C38347018 @default.
- W2023667478 hasConceptScore W2023667478C49040817 @default.
- W2023667478 hasConceptScore W2023667478C544956773 @default.
- W2023667478 hasConceptScore W2023667478C56052488 @default.
- W2023667478 hasConceptScore W2023667478C57410435 @default.
- W2023667478 hasConceptScore W2023667478C62520636 @default.
- W2023667478 hasConceptScore W2023667478C64297162 @default.
- W2023667478 hasConceptScore W2023667478C82706917 @default.
- W2023667478 hasConceptScore W2023667478C86803240 @default.
- W2023667478 hasIssue "7S" @default.
- W2023667478 hasLocation W20236674781 @default.
- W2023667478 hasOpenAccess W2023667478 @default.
- W2023667478 hasPrimaryLocation W20236674781 @default.
- W2023667478 hasRelatedWork W1966810442 @default.
- W2023667478 hasRelatedWork W2005379894 @default.
- W2023667478 hasRelatedWork W2006320572 @default.
- W2023667478 hasRelatedWork W2078183599 @default.
- W2023667478 hasRelatedWork W2084181803 @default.
- W2023667478 hasRelatedWork W2089633568 @default.
- W2023667478 hasRelatedWork W2095015337 @default.
- W2023667478 hasRelatedWork W2129859591 @default.
- W2023667478 hasRelatedWork W2141953754 @default.
- W2023667478 hasRelatedWork W2312852125 @default.
- W2023667478 hasVolume "33" @default.
- W2023667478 isParatext "false" @default.
- W2023667478 isRetracted "false" @default.
- W2023667478 magId "2023667478" @default.
- W2023667478 workType "article" @default.