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- W2023685746 abstract "Crystallinity, electrical properties, and adhesion to substrates were investigated using 1.4-µm-thick β-FeSi2 continuous films prepared on abraded Si substrates. When the substrates were abraded, the films did not peel off even when they were cooled rapidly after annealing. Moreover, Fe–Si sputtered films could be grown up to β-FeSi2 by only one-hour annealing. The conduction type of β-FeSi2 films prepared from a precursor with Si/Fe=1.7 was of the p-type, with a carrier density of 1015–1016 cm-3 and a mobility of 80–350 cm2/V·s at room temperature, which are desirable values for solar cell applications." @default.
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- W2023685746 date "2004-10-08" @default.
- W2023685746 modified "2023-09-27" @default.
- W2023685746 title "Electrical Properties of 1-µm-Thick Continuous β-FeSi2Films on Abraded Si-Substrates Grown by RF-Magnetron Sputtering" @default.
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- W2023685746 doi "https://doi.org/10.1143/jjap.43.6994" @default.
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