Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023693276> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W2023693276 endingPage "429" @default.
- W2023693276 startingPage "425" @default.
- W2023693276 abstract "Excimer laser ablation is normally used for micromachining of binary structures, for instance holes or cuts. We investigated new machining techniques for the fabrication of three-dimensional (3D) structures with analogous topology by excimer laser ablation: (i) line scan with a contour mask which correlates with the desired topology and (ii) gray scale mask projection. The structuring methods make use of the dependence of the machined depth (i) on the locally applied pulse quantity or (ii) on the energy density. The details of the methods, the process parameters and the resultant structure properties are discussed. Examples for the structuring of cylindrical and spherical microlenses and microarrays with dimensions in the micron range are given." @default.
- W2023693276 created "2016-06-24" @default.
- W2023693276 creator A5002518288 @default.
- W2023693276 creator A5011347141 @default.
- W2023693276 creator A5080219140 @default.
- W2023693276 date "1996-04-01" @default.
- W2023693276 modified "2023-09-26" @default.
- W2023693276 title "Excimer laser machining for the fabrication of analogous microstructures" @default.
- W2023693276 cites W2170122499 @default.
- W2023693276 doi "https://doi.org/10.1016/0169-4332(95)00498-x" @default.
- W2023693276 hasPublicationYear "1996" @default.
- W2023693276 type Work @default.
- W2023693276 sameAs 2023693276 @default.
- W2023693276 citedByCount "61" @default.
- W2023693276 countsByYear W20236932762012 @default.
- W2023693276 countsByYear W20236932762013 @default.
- W2023693276 countsByYear W20236932762014 @default.
- W2023693276 countsByYear W20236932762015 @default.
- W2023693276 countsByYear W20236932762018 @default.
- W2023693276 countsByYear W20236932762019 @default.
- W2023693276 countsByYear W20236932762020 @default.
- W2023693276 crossrefType "journal-article" @default.
- W2023693276 hasAuthorship W2023693276A5002518288 @default.
- W2023693276 hasAuthorship W2023693276A5011347141 @default.
- W2023693276 hasAuthorship W2023693276A5080219140 @default.
- W2023693276 hasConcept C11413529 @default.
- W2023693276 hasConcept C114614502 @default.
- W2023693276 hasConcept C120665830 @default.
- W2023693276 hasConcept C121332964 @default.
- W2023693276 hasConcept C127413603 @default.
- W2023693276 hasConcept C136525101 @default.
- W2023693276 hasConcept C142724271 @default.
- W2023693276 hasConcept C145667562 @default.
- W2023693276 hasConcept C146978453 @default.
- W2023693276 hasConcept C184720557 @default.
- W2023693276 hasConcept C191897082 @default.
- W2023693276 hasConcept C192562407 @default.
- W2023693276 hasConcept C204787440 @default.
- W2023693276 hasConcept C2778386843 @default.
- W2023693276 hasConcept C2778902805 @default.
- W2023693276 hasConcept C2779188808 @default.
- W2023693276 hasConcept C2780477314 @default.
- W2023693276 hasConcept C2984025587 @default.
- W2023693276 hasConcept C33923547 @default.
- W2023693276 hasConcept C41008148 @default.
- W2023693276 hasConcept C520434653 @default.
- W2023693276 hasConcept C523214423 @default.
- W2023693276 hasConcept C57493831 @default.
- W2023693276 hasConcept C71924100 @default.
- W2023693276 hasConceptScore W2023693276C11413529 @default.
- W2023693276 hasConceptScore W2023693276C114614502 @default.
- W2023693276 hasConceptScore W2023693276C120665830 @default.
- W2023693276 hasConceptScore W2023693276C121332964 @default.
- W2023693276 hasConceptScore W2023693276C127413603 @default.
- W2023693276 hasConceptScore W2023693276C136525101 @default.
- W2023693276 hasConceptScore W2023693276C142724271 @default.
- W2023693276 hasConceptScore W2023693276C145667562 @default.
- W2023693276 hasConceptScore W2023693276C146978453 @default.
- W2023693276 hasConceptScore W2023693276C184720557 @default.
- W2023693276 hasConceptScore W2023693276C191897082 @default.
- W2023693276 hasConceptScore W2023693276C192562407 @default.
- W2023693276 hasConceptScore W2023693276C204787440 @default.
- W2023693276 hasConceptScore W2023693276C2778386843 @default.
- W2023693276 hasConceptScore W2023693276C2778902805 @default.
- W2023693276 hasConceptScore W2023693276C2779188808 @default.
- W2023693276 hasConceptScore W2023693276C2780477314 @default.
- W2023693276 hasConceptScore W2023693276C2984025587 @default.
- W2023693276 hasConceptScore W2023693276C33923547 @default.
- W2023693276 hasConceptScore W2023693276C41008148 @default.
- W2023693276 hasConceptScore W2023693276C520434653 @default.
- W2023693276 hasConceptScore W2023693276C523214423 @default.
- W2023693276 hasConceptScore W2023693276C57493831 @default.
- W2023693276 hasConceptScore W2023693276C71924100 @default.
- W2023693276 hasLocation W20236932761 @default.
- W2023693276 hasOpenAccess W2023693276 @default.
- W2023693276 hasPrimaryLocation W20236932761 @default.
- W2023693276 hasRelatedWork W1964153258 @default.
- W2023693276 hasRelatedWork W1965485429 @default.
- W2023693276 hasRelatedWork W1967634680 @default.
- W2023693276 hasRelatedWork W2090049863 @default.
- W2023693276 hasRelatedWork W2091237035 @default.
- W2023693276 hasRelatedWork W2092607293 @default.
- W2023693276 hasRelatedWork W3198945108 @default.
- W2023693276 hasRelatedWork W4255972805 @default.
- W2023693276 hasRelatedWork W4320804093 @default.
- W2023693276 hasRelatedWork W2475413036 @default.
- W2023693276 hasVolume "96-98" @default.
- W2023693276 isParatext "false" @default.
- W2023693276 isRetracted "false" @default.
- W2023693276 magId "2023693276" @default.
- W2023693276 workType "article" @default.