Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023703083> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W2023703083 abstract "Lead zirconate titanate (PbZrxTi1-xO3, or PZT) is a piezoelectric material widely used as sensors and actuators. For microactuators, PZT often appears in the form of thin films to maintain proper aspect ratios. One major challenge encountered is accurate measurement of piezoelectric coefficients of PZT thin films. In this paper, we present a simple, low-cost, and effective method to measure piezoelectric coefficient d33 of PZT thin films through use of basic principles in mechanics of vibration. A small impact hammer with a tiny tip acts perpendicularly to the PZT thin-film surface to generate an impulsive force. In the meantime, a load cell at the hammer tip measures the impulsive force and a charge amplifier measures the responding charge of the PZT thin film. Then the piezoelectric coefficient d33 is obtained from the measured force and charge based on piezoelectricity and a finite element modeling. We also conduct a thorough parametric study to understand the sensitivity of this method on various parameters, such as substrate material, boundary conditions, specimen size, specimen thickness, thickness ratio, and PZT thin-film material. Two rounds of experiments are conducted to demonstrate the feasibility and accuracy of this new method. The first experiment is to measure d33 of a PZT disk resonator whose d33 is known. Experimental results show that d33 measured via this method is as accurate as that from the manufacturer's specifications within its tolerance. The second experiment is to measure d33 of PZT thin films deposited on silicon substrates. With the measured d33, we predict the displacement of PZT thin-film membrane microactuators. In the meantime, the actuator displacement is measured via a laser Doppler vibrometer. The predicted and measured displacements agree very well validating the accuracy of this new method." @default.
- W2023703083 created "2016-06-24" @default.
- W2023703083 creator A5016893182 @default.
- W2023703083 creator A5019861422 @default.
- W2023703083 creator A5027308440 @default.
- W2023703083 date "2013-02-01" @default.
- W2023703083 modified "2023-10-05" @default.
- W2023703083 title "Measurements of Piezoelectric Coefficient d33 of Lead Zirconate Titanate Thin Films Using a Mini Force Hammer" @default.
- W2023703083 cites W1978982023 @default.
- W2023703083 cites W1991762486 @default.
- W2023703083 cites W1995657576 @default.
- W2023703083 cites W1999678806 @default.
- W2023703083 cites W2013934118 @default.
- W2023703083 cites W2019891492 @default.
- W2023703083 cites W2028715630 @default.
- W2023703083 cites W2044073130 @default.
- W2023703083 cites W2045078566 @default.
- W2023703083 cites W2045283999 @default.
- W2023703083 cites W2046104316 @default.
- W2023703083 cites W2052282168 @default.
- W2023703083 cites W2057921483 @default.
- W2023703083 cites W2072828450 @default.
- W2023703083 cites W2074869505 @default.
- W2023703083 cites W2082286690 @default.
- W2023703083 cites W2084085904 @default.
- W2023703083 cites W2085595972 @default.
- W2023703083 cites W2096063654 @default.
- W2023703083 cites W2099781332 @default.
- W2023703083 cites W2105962927 @default.
- W2023703083 cites W2126495679 @default.
- W2023703083 cites W2133069847 @default.
- W2023703083 cites W2136383298 @default.
- W2023703083 cites W2139892018 @default.
- W2023703083 cites W2146218304 @default.
- W2023703083 cites W2169903090 @default.
- W2023703083 doi "https://doi.org/10.1115/1.4006881" @default.
- W2023703083 hasPublicationYear "2013" @default.
- W2023703083 type Work @default.
- W2023703083 sameAs 2023703083 @default.
- W2023703083 citedByCount "99" @default.
- W2023703083 countsByYear W20237030832014 @default.
- W2023703083 countsByYear W20237030832015 @default.
- W2023703083 countsByYear W20237030832016 @default.
- W2023703083 countsByYear W20237030832017 @default.
- W2023703083 countsByYear W20237030832018 @default.
- W2023703083 countsByYear W20237030832019 @default.
- W2023703083 countsByYear W20237030832020 @default.
- W2023703083 countsByYear W20237030832021 @default.
- W2023703083 countsByYear W20237030832022 @default.
- W2023703083 countsByYear W20237030832023 @default.
- W2023703083 crossrefType "journal-article" @default.
- W2023703083 hasAuthorship W2023703083A5016893182 @default.
- W2023703083 hasAuthorship W2023703083A5019861422 @default.
- W2023703083 hasAuthorship W2023703083A5027308440 @default.
- W2023703083 hasConcept C100082104 @default.
- W2023703083 hasConcept C121332964 @default.
- W2023703083 hasConcept C133386390 @default.
- W2023703083 hasConcept C135405054 @default.
- W2023703083 hasConcept C159985019 @default.
- W2023703083 hasConcept C171250308 @default.
- W2023703083 hasConcept C19067145 @default.
- W2023703083 hasConcept C192562407 @default.
- W2023703083 hasConcept C24890656 @default.
- W2023703083 hasConcept C2781128178 @default.
- W2023703083 hasConcept C49040817 @default.
- W2023703083 hasConcept C79090758 @default.
- W2023703083 hasConceptScore W2023703083C100082104 @default.
- W2023703083 hasConceptScore W2023703083C121332964 @default.
- W2023703083 hasConceptScore W2023703083C133386390 @default.
- W2023703083 hasConceptScore W2023703083C135405054 @default.
- W2023703083 hasConceptScore W2023703083C159985019 @default.
- W2023703083 hasConceptScore W2023703083C171250308 @default.
- W2023703083 hasConceptScore W2023703083C19067145 @default.
- W2023703083 hasConceptScore W2023703083C192562407 @default.
- W2023703083 hasConceptScore W2023703083C24890656 @default.
- W2023703083 hasConceptScore W2023703083C2781128178 @default.
- W2023703083 hasConceptScore W2023703083C49040817 @default.
- W2023703083 hasConceptScore W2023703083C79090758 @default.
- W2023703083 hasIssue "1" @default.
- W2023703083 hasLocation W20237030831 @default.
- W2023703083 hasOpenAccess W2023703083 @default.
- W2023703083 hasPrimaryLocation W20237030831 @default.
- W2023703083 hasRelatedWork W1969443192 @default.
- W2023703083 hasRelatedWork W1981266897 @default.
- W2023703083 hasRelatedWork W1992049217 @default.
- W2023703083 hasRelatedWork W1995958177 @default.
- W2023703083 hasRelatedWork W2014315543 @default.
- W2023703083 hasRelatedWork W2281145519 @default.
- W2023703083 hasRelatedWork W3203838132 @default.
- W2023703083 hasRelatedWork W4281572574 @default.
- W2023703083 hasRelatedWork W4319066725 @default.
- W2023703083 hasRelatedWork W2587533067 @default.
- W2023703083 hasVolume "135" @default.
- W2023703083 isParatext "false" @default.
- W2023703083 isRetracted "false" @default.
- W2023703083 magId "2023703083" @default.
- W2023703083 workType "article" @default.