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- W2023707285 abstract "By analyzing the spectral domain’s phase information, the spectrally resolved white-light interferometry (SRWLI) is capable of obtaining the profile with a single frame of interferogram. However, only one-dimensional (1-D) surfaces can be tested with this technique, otherwise the interference patterns under adjacent wavelengths would overlap each other, which would make the whole interferogram hard to identify. We present here a 2-D SRWLI method which can be applied to measure narrow rectangle areas. Frequency comb is produced by means of using a F-P etalon to filter the broadband source. With the filtered frequency comb illumination, the interference patterns under adjacent wavelengths would be separated by a little distance, which enables us to obtain a 2-D profile with a small width. The experimental details of measurement of a step sample are discussed in this paper." @default.
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- W2023707285 date "2012-10-15" @default.
- W2023707285 modified "2023-09-25" @default.
- W2023707285 title "Two-dimensional structural surface measurement based on spectrally resolved white-light interferometry" @default.
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- W2023707285 doi "https://doi.org/10.1117/12.964378" @default.
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