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- W2023709157 abstract "Because the Pb-based piezoelectric materials showed problems such as an environmental pollution. lead-free ZnSnO3 materials were studied in the present study. The ZnSnO3 thin films were deposited at 640°C on Pt/Ti/SiO2 substrate by pulsed laser deposition (PLD) and were annealed for 5 min at 750°C using rapid thermal annealing (RTA) in nitrogen atmosphere. Samples annealed at 750°C showed a smooth morphology and an improvement of the dielectric and leakage properties, as compared with as-grown samples. However, electrical properties of the ZnSnO3 thin films obtained in the present study should be improved for piezoelectric applications." @default.
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- W2023709157 date "2014-01-01" @default.
- W2023709157 modified "2023-09-26" @default.
- W2023709157 title "Fabrication and Properties of ZnSnO3Piezoelectric Films Deposited by a Pulsed Laser Deposition" @default.
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- W2023709157 doi "https://doi.org/10.4313/jkem.2014.27.1.18" @default.
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