FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023741490> ?p ?o ?g. }

• W2023741490 endingPage "055017" @default.
• W2023741490 startingPage "055017" @default.
• W2023741490 abstract "A new method for the accurate alignment of lithographically-defined patterns to the crystallographic axes of substrates is presented. We provide a lower (worst-case) limit of the achievable high aspect ratio using anisotropic wet chemical silicon etch for deep trenches. The method uses the fact that the intensity of light reflected from two sets of gratings, one on the photomask and the other on the substrate, is a sharp function of their relative angular misalignment. By using pre-etched gratings on the substrate formed by wet anisotropic etching, alignment accuracies better than 50 millidegrees with respect to silicon crystallographic axes have been demonstrated. Two types of microstructures—trenches with an aspect ratio >90:1 and silicon nanowires with widths <50 nm with atomically smooth etched facets—have been fabricated using i-line lithography to illustrate some applications of this alignment method. This all-optical method is readily applicable to industry-standard optical lithography and avoids the need for any individualized process steps, enabling cost-effective micro/nanostructure manufacturing." @default.
• W2023741490 created "2016-06-24" @default.
• W2023741490 creator A5045336993 @default.
• W2023741490 creator A5047294694 @default.
• W2023741490 creator A5065625088 @default.
• W2023741490 date "2013-04-04" @default.
• W2023741490 modified "2023-10-07" @default.
• W2023741490 title "A novel batch-processing method for accurate crystallographic axis alignment" @default.
• W2023741490 cites W1670172520 @default.
• W2023741490 cites W1963887037 @default.
• W2023741490 cites W1964002259 @default.
• W2023741490 cites W1965669173 @default.
• W2023741490 cites W1975432346 @default.
• W2023741490 cites W1976560751 @default.
• W2023741490 cites W1978523791 @default.
• W2023741490 cites W1987173479 @default.
• W2023741490 cites W1997913942 @default.
• W2023741490 cites W2001354077 @default.
• W2023741490 cites W2014236123 @default.
• W2023741490 cites W2029778279 @default.
• W2023741490 cites W2033535795 @default.
• W2023741490 cites W2034705956 @default.
• W2023741490 cites W2057225362 @default.
• W2023741490 cites W2061089703 @default.
• W2023741490 cites W2064758662 @default.
• W2023741490 cites W2071650827 @default.
• W2023741490 cites W2077609143 @default.
• W2023741490 cites W2078607670 @default.
• W2023741490 cites W2079745043 @default.
• W2023741490 cites W2084772578 @default.
• W2023741490 cites W2092346700 @default.
• W2023741490 cites W2094477398 @default.
• W2023741490 cites W2127541566 @default.
• W2023741490 cites W2951239498 @default.
• W2023741490 cites W4376848279 @default.
• W2023741490 doi "https://doi.org/10.1088/0960-1317/23/5/055017" @default.
• W2023741490 hasPublicationYear "2013" @default.
• W2023741490 type Work @default.
• W2023741490 sameAs 2023741490 @default.
• W2023741490 citedByCount "7" @default.
• W2023741490 countsByYear W20237414902014 @default.
• W2023741490 countsByYear W20237414902015 @default.
• W2023741490 countsByYear W20237414902016 @default.
• W2023741490 countsByYear W20237414902019 @default.
• W2023741490 crossrefType "journal-article" @default.
• W2023741490 hasAuthorship W2023741490A5045336993 @default.
• W2023741490 hasAuthorship W2023741490A5047294694 @default.
• W2023741490 hasAuthorship W2023741490A5065625088 @default.
• W2023741490 hasBestOaLocation W20237414902 @default.
• W2023741490 hasConcept C100460472 @default.
• W2023741490 hasConcept C105487726 @default.
• W2023741490 hasConcept C111368507 @default.
• W2023741490 hasConcept C120665830 @default.
• W2023741490 hasConcept C121332964 @default.
• W2023741490 hasConcept C127313418 @default.
• W2023741490 hasConcept C14737013 @default.
• W2023741490 hasConcept C171250308 @default.
• W2023741490 hasConcept C186187911 @default.
• W2023741490 hasConcept C192562407 @default.
• W2023741490 hasConcept C204223013 @default.
• W2023741490 hasConcept C2777289219 @default.
• W2023741490 hasConcept C2779227376 @default.
• W2023741490 hasConcept C33220542 @default.
• W2023741490 hasConcept C49040817 @default.
• W2023741490 hasConcept C53524968 @default.
• W2023741490 hasConcept C544956773 @default.
• W2023741490 hasConcept C74214498 @default.
• W2023741490 hasConcept C82558694 @default.
• W2023741490 hasConceptScore W2023741490C100460472 @default.
• W2023741490 hasConceptScore W2023741490C105487726 @default.
• W2023741490 hasConceptScore W2023741490C111368507 @default.
• W2023741490 hasConceptScore W2023741490C120665830 @default.
• W2023741490 hasConceptScore W2023741490C121332964 @default.
• W2023741490 hasConceptScore W2023741490C127313418 @default.
• W2023741490 hasConceptScore W2023741490C14737013 @default.
• W2023741490 hasConceptScore W2023741490C171250308 @default.
• W2023741490 hasConceptScore W2023741490C186187911 @default.
• W2023741490 hasConceptScore W2023741490C192562407 @default.
• W2023741490 hasConceptScore W2023741490C204223013 @default.
• W2023741490 hasConceptScore W2023741490C2777289219 @default.
• W2023741490 hasConceptScore W2023741490C2779227376 @default.
• W2023741490 hasConceptScore W2023741490C33220542 @default.
• W2023741490 hasConceptScore W2023741490C49040817 @default.
• W2023741490 hasConceptScore W2023741490C53524968 @default.
• W2023741490 hasConceptScore W2023741490C544956773 @default.
• W2023741490 hasConceptScore W2023741490C74214498 @default.
• W2023741490 hasConceptScore W2023741490C82558694 @default.
• W2023741490 hasIssue "5" @default.
• W2023741490 hasLocation W20237414901 @default.
• W2023741490 hasLocation W20237414902 @default.
• W2023741490 hasOpenAccess W2023741490 @default.
• W2023741490 hasPrimaryLocation W20237414901 @default.
• W2023741490 hasRelatedWork W1761205390 @default.
• W2023741490 hasRelatedWork W1988683331 @default.
• W2023741490 hasRelatedWork W2092116273 @default.
• W2023741490 hasRelatedWork W2173632239 @default.
• W2023741490 hasRelatedWork W2217565406 @default.
• W2023741490 hasRelatedWork W2467622408 @default.

• next