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• W2023744698 abstract "A three-dimensional p–n diode structure is presented for the generation of energy via photovoltaic and betavoltaic modes of operation. Macroporous Silicon (MPS) has a large degree of internal surface area and its vertically oriented pores, which extend deep into the bulk of the Si substrate, allow for the creation of three-dimensional structures. In this device the MPS will not only serve as a means for creating 3D diode structures, it will also serve as a host matrix for a tritium isotope which emits energetic beta particles. By varying electrochemical etching conditions and using a prepatterning technique, 1.1 μm diameter pores with a spacing of 2.5 μm were achieved. The p–n junction was created using a rapid thermal process (RTP) which relies on the diffusion from an n-type solid source into the MPS. To ensure the quality of the diode structure, devices were tested using a light source which resulted in a photovoltaic response. Finally, betavoltaic operation was demonstrated by exposing devices to a tritium gas source. The average energy conversion efficiency of the first generation 3D diode was one order of magnitude higher than that of a similar planar device. (© 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)" @default.
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• W2023744698 date "2007-05-01" @default.
• W2023744698 modified "2023-09-26" @default.
• W2023744698 title "Betavoltaic and photovoltaic energy conversion in three-dimensional macroporous silicon diodes" @default.
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• W2023744698 doi "https://doi.org/10.1002/pssa.200674417" @default.
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