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- W2023747505 abstract "The nitrogen incorporated diamond-like carbon films were deposited on Si (100) substrates by arc ion plating (AIP) under different N(2) content in the gas mixture of Ar and N(2). The influence of N(2) content on the film microstructure and mechanical properties was studied by atomic force microscopy, transmission electron microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) and nanoindentation. It was found that the hardness (H), elastic modulus (E), elastic recovery (R) and plastic resistance parameter (HIE) decrease with increasing the nitrogen content. The decrease of mechanical properties of DLC films resulted from nitrogen incorporation was associated with total sp(3) carbon bond content and N-sp(3)C bond content. The structural modification as well as mechanical properties of the annealed nitrogen incorporated diamond-like carbon films was investigated as a function of annealing temperature. Raman spectra indicate that the I(D)/I(G), ratio starts to increase and G peak position shifts upward at the annealing temperature over 500 degrees C. The hardness and elastic modulus of thermally annealed nitrogen incorporated DLC films decreased slightly at lower annealing temperature and then significantly decreased at higher annealing temperature. The strong covalent bonding between C and N atoms is expected to be effective on their thermal stability enhancement. (C) 2009 Elsevier Ltd. All rights reserved." @default.
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- W2023747505 date "2009-07-01" @default.
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- W2023747505 title "Mechanical properties and thermal stability of nitrogen incorporated diamond-like carbon films" @default.
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- W2023747505 doi "https://doi.org/10.1016/j.vacuum.2009.04.072" @default.
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